Testing of electronic circuits using an active probe integrated circuit
A technology of integrated circuits and probes, used in electronic circuit testing, measurement leads/probes, components of electrical measuring instruments, etc., to achieve the effect of improving performance and high-frequency signal integrity
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[0072] The following description relates to a novel probe card structure for testing electronic devices, especially integrated circuits (ICs). The concept is called an "active probe".
[0073] The principles of the described apparatus and method are applicable to probe testing and thus can test several types of ICs, including but not limited to ICs such as RF, serializer / deserializer (SerDes), memory, logic, parametric, digital ICs for signal processing as well as applications in logic circuits and digital devices. The processes and apparatus described here are illustrated using as an example a probe card with active probes for RF wafer testing using RF as the high frequency signal. Those of ordinary skill in the art will appreciate that the principles can be applied to several other applications, such as testing high-speed digital circuits, networking circuits, microprocessors, high-frequency circuits, high-precision analog memory devices, and mixed signal circuits. example...
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