Substrate processing system and substrate carrying device thereof

Abstract

The embodiment of the invention provides a substrate processing system and a substrate carrying device thereof, wherein the substrate processing system comprises a storage case and the substrate carrying device. The storage case is provided with a plurality of accommodating spaces for storing substrates, and the accommodating spaces are mutually laminated along an array direction. The substrate carrying device comprises a main body, a bearing unit and at least one substrate protruded sensor. The bearing unit is suitable to be moved between a standby position and at least one working position, and is provided with a bearing surface and a first end and a second end which are opposite to each other, and the first end is connected to the main body. The substrate protruded sensor is configured on the bearing unit and positioned at the second end. In addition, the substrate protruded sensor is provided with a first sensing surface which is towards the array direction of the accommodating spaces like the bearing surface of the bearing unit. The substrate processing system can sense whether the substrate has excessively protruding condition during mapping sense so as to avoid crushing the substrate.

Description

technical field [0001] The present invention relates to a substrate processing system and a substrate conveying device thereof, and in particular to a substrate processing system and a substrate conveying device capable of detecting abnormally positioned substrates and missing corners of the substrate. Background technique [0002] In the process of the display device, since the substrate needs to go through multiple process procedures, a handling device must be used to transport the substrate between the various process procedures. The current method is to take out the substrate from the storage box (Cassette) by the robot arm, and transport it to the process machine for process reaction, and then send the substrate back from the machine to the storage box after the process is completed. , to carry out a series of process steps. [0003] Moreover, in order to obtain the number of substrates stored in the storage box or other information, the robotic arm will first move up ...

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Problems solved by technology

In this way, it will lead to the problem of increased maintenance cost and waste of manpower.

[0005] In addition, in recent years, the size of display panels has been increasing, and large-sized glass substrates are prone to chipping or damage during transportation. However, since the known substrate handling device does not have the function of detecting chipping, when there The substrate with corners must be transferred to the process machine before it can be detected by the machine operator due to factors such as the discrepancies in the size of the substrate

This will not only cause trouble for the machine operator, but also consume more manufacturing man-hours

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