White light interference profile meter

Abstract

The invention discloses a white light interference optical profile meter, comprising a macro / micro two-stage driving and displacement metering device in a vertical direction, white light interference displacement sensors and a universal table, wherein, the white light interference displacement sensors are fixed on the driving and displacement metering device fixed on an upright post, and the upright post is fixed on a vibration isolating table facet on which the universal table is placed. The wide-range three-dimensional optical profile meter based on white light interference and vertical scanning technology realizes rough and fine two-stage driving respectively by a servo motor and piezoelectric ceramic, so as to drive the white light interference displacement sensors to integrally move, adding the servo motor in vertical displacement can enlarge the measurement range, and vertical scanning is accomplished by the piezoelectric ceramic. The measurement of macro / micro displacement is completed by using the same diffraction grating metering system. The profile meter is capable of automatically searching for interference fringes and realizing the three-dimensional profiles of wide-range non-contact measurement planes and curved surfaces, and has the characteristics of high measurement precision, large measurement range, low cost and the like.

Description

technical field [0001] The invention belongs to the technical field of measuring devices, in particular to a large-range three-dimensional surface topography optical profile measuring instrument based on white light interference and vertical scanning technology. Background technique [0002] There are many methods for measuring the three-dimensional micro-topography of the surface, which can usually be divided into two categories: contact type and non-contact type. Vertical scanning white light interferometry is an optical non-contact measurement method developed on the basis of phase shift interferometry, which combines white light interference microscopy and phase shift interferometry. At present, the three-dimensional surface topography measurement systems based on vertical scanning white light interferometry mainly include the following: [0003] 1. Vertical scanning white-light interferometer for Linnik interference microstructure ([1] Pfortner A, Schwide J. Dispersion...

AI Technical Summary

Problems solved by technology

The vertical scanning resolution of the profiler can reach 1nm, but the instrument has the disadvantages that the magnification cannot be adjusted, the optical system can be adjusted more, and the workpiece cannot be too heavy.

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