Planar motor adopting three-dimensional permanent magnet array

Abstract

The invention relations to a planar motor adopting a three-dimensional permanent magnet array, and the planar motor comprises a rotor and a stator. The rotor adopts a three-dimensional permanent magnet array, the three-dimensional permanent magnet array consists of S-type and N-type big permanent magnets which are respectively provided with an S-pole upper bottom surface and an N-pole upper bottom surface and both shaped like frustums of square pyramids and a small permanent magnet, the S-type and the N-type big permanent magnets both carry out the magnetizing along the direction of connecting lines of centers of the respective upper and lower bottom surfaces, the small permanent magnet is obtained by symmetrically cutting a quadrangular pyramid from the upper bottom surface and the lower bottom surface of a straight triangular prism with the bottom surface which is shaped like an isosceles triangle, the magnetizing direction is parallel to the direction of the bottom side of the isosceles triangle of the bottom surface, the lower bottom surfaces of the S-type and the N-type big permanent magnets are downward, the S-type and the N-type big permanent magnets are arranged in a staggered manner along the X direction and the Y direction for forming a planar array, the small permanent magnet is arranged between the adjacent two big permanent magnets, and the magnetizing direction of the small permanent magnet is pointed to an S pole of the adjacent S-type big permanent magnet from an N pole of the N-type big permanent magnet. The rotor can generate higher field strength mass ratio in air gap and further improve the thrust and the acceleration of the planar motor.

Description

technical field [0001] The invention relates to a planar motor, in particular to a planar motor using a three-dimensional permanent magnet array, which is mainly used in the fields of manufacturing equipment and robots. Background technique [0002] In many industrial equipment, we need to drive the workpiece or the worktable to move in the plane and position it precisely on the plane, such as the stage of the microscope, the silicon wafer stage in the lithography machine and other equipment. The traditional plane positioning device is composed of two or more sets of linear drive units stacked vertically. Each set of linear drive units consists of a rotary motor, a set of linear motion conversion mechanism and a set of linear guide rails, or a linear motor and a set of linear guides. A set of linear guide rails. The linear drive unit located on the bottom not only bears the drive of the end bearing table, but also bears the mass of the top linear drive unit, thus causing th...

AI Technical Summary

Problems solved by technology

The linear drive unit located on the bottom not only bears the drive of the end bearing table, but also bears the mass of the top linear drive unit, thus causing the plane positioning device to move in multiple directions (such as the X direction and Y direction of the traditional XY table) The serious imbalance of motion inertia affects the improvement of performance indicators such as motion stroke, response speed, and motion accuracy.

Images