Substrate transmission mechanism

Abstract

The invention discloses a substrate transmission mechanism, which comprises an actuating device, a primary transmission gear, a soleplate and two secondary transmission gears, wherein each secondary transmission gear comprises a bearing box, a magnetic transmission shaft, a first helical gear, and a plurality of first permanent magnetic gears and magnetic transmission units which correspond mutually; the bearing box is connected with the soleplate, the magnetic transmission units are parallelly pivoted with the bearing box, and are provided with roller wheels; the first helical gear is fixed on the magnetic transmission shaft, the primary transmission gear is provided with a second helical gear engaged with the first helical gear, and the first helical gear and the second helical gear are axially and mutually vertical; and the first permanent magnetic gears are fixed on the magnetic transmission shaft, the magnetic transmission units are provided with second permanent magnetic gears corresponding to the first permanent magnetic gears, the first permanent magnetic gears and the second permanent magnetic gears are axially and mutually vertical, and the first permanent magnetic gears drive the second permanent magnetic gears through a magnetic field. The substrate transmission mechanism realizes low noise and high cleanness in the process of transmitting substrates, and has simple structure and low production cost.

Description

technical field [0001] The invention relates to a transmission mechanism for a plate-shaped thin substrate, in particular to a substrate transmission mechanism suitable for a plate-shaped thin substrate in a vacuum chamber. Background technique [0002] With the continuous development of the economy, the continuous advancement of science and technology and the decrease of world energy, people pay more and more attention to energy conservation and utilization efficiency in production, so that the harmonious development of man and nature can meet the requirements of China's new industrialization road. [0003] For example, in the display industry of digital products, in order to save energy and reduce production costs, enterprises have increased investment in research and development, and are constantly pursuing new energy-saving products. Among them, OLED display is a new product in digital products. OLED is Organic Light-Emitting Diode (Organic Light-Emitting Diode), also kn...

AI Technical Summary

Problems solved by technology

Due to the direct contact between the substrate and the conveying roller in the above-mentioned transmission method, it is easy to cause mechanical wear of the substrate during the transmission process, which affects the accuracy and quality of the finished product; at the same time, due to the contact of various moving components such as gears and screw rods, the transmission is easy The moving components of the equipment are granulated due to friction, and the dust generated enters the substrate transfer area, which affects the cleanliness of the substrate and generates a lot of noise during the transfer process; in addition, the friction between the moving parts of the transfer The service life of each moving component is shortened, and the service life of the transmission equipment is also shortened accordingly

Another transmission method is to use industrial robots for transmission. Due to the high cost of equipment and the large footprint, its manufacturing cost is high, which limits large-scale production and application

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