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Error detecting system of minitype high accuracy three coordinate measuring machine

A three-coordinate measuring machine, high-precision technology, used in measuring devices, instruments, optical devices, etc. It can improve the verification efficiency, easy to understand and grasp, and the measurement space is small.

Inactive Publication Date: 2009-11-04
HEFEI UNIV OF TECH
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  • Abstract
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  • Application Information

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Problems solved by technology

Commonly used verification methods include dual-frequency laser interferometer method, 22-line method, one-dimensional spherical array method, two-dimensional gage method, magnetic ball-and-stick method, Renishaw inspection rule, etc., but for micro-high-precision three-coordinate The measurement accuracy of the measuring machine is high, and the measurement space range is small. The verification accuracy of these methods cannot meet the requirements. The target mirror or inspection body used is too large in size and heavy in quality. Therefore, it cannot be used for miniature high-precision three-dimensional coordinates. Error Verification of Measuring Machine

Method used

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  • Error detecting system of minitype high accuracy three coordinate measuring machine
  • Error detecting system of minitype high accuracy three coordinate measuring machine
  • Error detecting system of minitype high accuracy three coordinate measuring machine

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Embodiment Construction

[0025] Such as figure 1 , figure 2 and Figure 5 As shown, the X / Y axis target mirror 11 has a longitudinal side plane reflector 6 whose mirror surface is parallel to the Y axis, a horizontal side plane reflector 7 whose mirror surface is parallel to the X axis, and is used to support the longitudinal side plane reflector 6 and the X / Y axial target mirror holder 19 of the horizontal plane mirror 7, the X / Y axial target mirror holder 19 can be placed on the coplanar biaxial positioning platform 5 of the three-coordinate measuring machine;

[0026] Such as image 3 , Figure 4 and Figure 7 As shown, the optical path turning target mirror 17 has an optical path turning mirror 13 with a mirror surface and a horizontal plane at an angle of 45° and an optical path turning target mirror holder 12 for supporting the optical path turning mirror 13, and the optical path turning target mirror holder 12 can be placed on three On the coplanar biaxial positioning platform 5 of the co...

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Abstract

The invention relates to an error detecting system of a minitype high accuracy three-coordinate measuring machine, which is characterized by comprising an X / Y axis target lens, an optical transition target lens, a Z axis target lens, a vertical edge laser interferometer having optical axis being parallel to X axis direction and a transverse edge laser interferometer having optical axis being parallel to Y axis direction. The error detecting system is synchronously tested by multiple items of high accuracy geometrical error, and can realize nanoscale precision detection for the geometrical error of the three-coordinate measuring machine. Furthermore, the error detecting system has high working efficiency and simple operating way.

Description

technical field [0001] The invention relates to an error verification device and method for a miniature three-coordinate measuring machine with high measurement accuracy. Background technique [0002] In order to meet the research needs of high-tech fields, with the continuous progress of micro-nano technology and the emergence of various micro-nano manufacturing methods, the processing precision of components is required to be micron or even nanometer level. Therefore, the study of nanoscale measurement technology has become the top priority in the field of metrology and testing. In recent years, many countries in the world have invested a lot of manpower and financial resources to develop a three-coordinate measuring machine with nanoscale precision and miniaturized volume. On the basis of hardware guarantee, it is an effective and cost-effective method to use error separation technology and further improve the accuracy of CMM through software compensation. The first step...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/26
Inventor 陈晓怀夏瑞雪
Owner HEFEI UNIV OF TECH
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