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Suspension rotor micro gyro by utilizing electromagnetism and charge relaxation to work

An electromagnetic levitation and electric charge technology, which is applied in the field of micro gyroscopes, can solve the problems of self-stabilized levitation, etc., and achieve the effect of enhancing the axially stable levitation stiffness, enhancing the radially stable levitation stiffness, and high precision

Inactive Publication Date: 2009-10-21
SHANGHAI JIAO TONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Solved the deficiency of self-stabilized suspension in the background technology

Method used

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  • Suspension rotor micro gyro by utilizing electromagnetism and charge relaxation to work
  • Suspension rotor micro gyro by utilizing electromagnetism and charge relaxation to work
  • Suspension rotor micro gyro by utilizing electromagnetism and charge relaxation to work

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Embodiment Construction

[0020] Embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and processes are provided, but the protection scope of the present invention is not limited to the following the embodiment.

[0021] like figure 1 , 2 As shown, this embodiment includes: upper stator 1, lower stator 4, peripheral structure 2, micro-rotor 3, upper stator 1, lower stator 4 are arranged up and down, upper stator 1, lower stator 4 and peripheral structure 2 are connected to form a cage structure, the peripheral structure 2 is arranged around the micro-rotor 3, and the micro-rotor 3 is placed in the middle of the cage structure, and the upper stator includes the upper stator rotating electrode, the inner ring 8 of the first suspended stable coil of the upper stator, and the first suspended stable coil of the upp...

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Abstract

The invention relates to a suspension rotor micro gyro by utilizing electromagnetism and charge relaxation to work, which is used in the field of navigation control of satellites, automobiles, and the like. The suspension rotor micro gyro consists of upper and lower stators, a micro rotor and a peripheral structure which form a cage structure. The stators comprise rotary driving electrodes, axial suspension detection electrodes, first suspension stabilization coils and second suspension stabilization coils, and are fixedly connected to a substrate; and under the action of electromagnetic force, the micro rotor suspends between the stators and has an annular shape, the inside and outside of the annulus are provided with surrounding structures which are mainly radial suspension electrodes and radial suspension detection electrodes. The micro gyro has simple structure, provides an electromagnetic suspension charge relaxation rotary structure, and can realize the self-stable suspension of the rotor by axially arranging inner and outer suspension stabilization coils. The axial and radial suspension detection electrodes can further enhance the suspension rigidity and realize position detection. The suspension rotor micro gyro has the characteristics of small size, light weight, low cost, high precision and low power consumption.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology (MEMS), in particular to a suspended-rotor micro-gyroscope which utilizes electromagnetic and electric charge relaxation to work. Background technique [0002] MEMS devices have the characteristics of miniaturization, low cost, low energy consumption, and mass production. In recent years, scholars and engineers from various countries have tried to design and manufacture suspended rotor MEMS micro gyroscopes. In the past two decades, many kinds of vibrating gyroscopes have been processed by using silicon surface micromachining technology or bulk micromachining technology at home and abroad, but it is difficult for microvibrating gyroscopes to achieve the high precision of traditional gyroscopes due to various reasons. [0003] After searching the literature of the prior art, it is found that the Chinese patent number is: 200410018015.7, and the name is: a suspe...

Claims

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Application Information

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IPC IPC(8): G01C19/02G01C19/08G01C19/24B81B7/02
Inventor 张卫平刘凯陈文元崔峰吴校生
Owner SHANGHAI JIAO TONG UNIV
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