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Large vacuum coating equipment

A vacuum coating and equipment technology, applied in vacuum evaporation coating, sputtering coating, gaseous chemical coating, etc., can solve the problems of poor product quality and high production cost, and achieve equipment cost saving, quality improvement, and shortening of rough pumping the effect of time

Inactive Publication Date: 2011-01-19
SHENZHEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Therefore, traditional large-scale vacuum coating equipment usually uses oil diffusion pumps and Roots pump units to pump air, resulting in high production costs and poor product quality, which has become a major problem in the current vacuum coating industry.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] This embodiment has the following advantages:

[0027] (1) In this embodiment, the traction molecular pump 14 and the water vapor pump 12 are used to replace the oil diffusion pump and Roots pump of the traditional coating equipment, so as to save 80% of energy consumption for pumping, improve the efficiency of vacuum coating, and improve the quality of coating products.

[0028] (2) The water vapor pump 12 does not need a backing pump, and the traction molecular pump 14 only needs to adopt the backing pump 17 of low pumping speed; therefore, the rough pump 16 is separated from the backing pump 17, and the traction molecular pump 14 adopts a dedicated backing pump 17, which can further save energy consumption.

[0029] (3) The working time of the rough pump 16 provided in this embodiment is very short, therefore, one rough pump 16 can be shared by multiple coating equipment, saving equipment cost and floor space.

[0030] (4) The coating chamber 11 is directly connecte...

Embodiment 2

[0035] Embodiment 3. Double-chamber winding large-scale vacuum coating equipment

[0036] This example figure 2 As shown, the coating equipment is composed of a winding chamber 29 and a coating chamber 21; one end of the winding chamber 29 communicates with the drag molecular pump 212 through a vacuum valve 211, and the drag molecular pump 212 communicates with the drag molecular pump 213 through a vacuum valve 213. The backing pump 214 communicates; the other end of the winding chamber 29 communicates with the rough pump 24 through a vacuum valve 25; the coating chamber 21 communicates with another traction molecular pump 216 through a vacuum valve 217, the traction The molecular pump 216 communicates with another backing pump 220 through a vacuum valve 215; the other end of the coating chamber 21 directly communicates with the water vapor pump 22; the coating chamber 21 is provided with a magnetron sputtering target 218.

Embodiment 3

[0037] In addition, the winding chamber 29 is also communicated with the intake valve 26 and the vacuum gauge 210; the winding chamber 29 is also provided with a feeding reel 28 and a receiving reel 27, and the film to be coated 221 is sleeved on On the feeding reel 28, guide through the roller 23, pass through the narrow slit, and carry out coating through the magnetron sputtering target 218, after the coating is completed, guide through the roller 23, pass through the narrow slit, and the material receiving The reel 27 is collected; the winding chamber 29 is also provided with a pair of glow discharge electrodes 219 that can perform glow cleaning and degassing on the film 221 to be coated before coating.

[0038] The operation steps of this embodiment are as follows:

[0039] (1) film to be coated 221 is installed in winding chamber 29 and coating chamber 21, then, close winding chamber 29 and coating chamber 21;

[0040] (2) close intake valve 26, vacuum valve 25, vacuum v...

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Abstract

The invention relates to a large vacuum coating equipment. A combined unit of a large pumping speed molecular drag pump and a water vapor pump is adopted to replace a diffusion pump and a lobed element pump of the traditional large vacuum coating equipment. The large vacuum coating equipment can save the air exhaust energy consumption by 80 percent, shortens rough pumping time, greatly reduces oilvapor pollution of a coating chamber and obviously improves the quality of coating products; a set of rough pumping system can be shared by a plurality of coating equipment, thus saving equipment cost and occupied space.

Description

technical field [0001] The invention belongs to the field of vacuum coating, in particular to a large-scale vacuum coating equipment. Background technique [0002] Large-scale vacuum coating equipment has a large volume (usually up to several cubic meters), a short coating cycle (usually about 30 minutes), and a high background vacuum (usually 10 -3 ~10 -2 pa), plus the inner wall of the coating chamber and the parts to be coated (especially plastic parts to be coated) will emit a large amount of gas (of which condensable gas usually accounts for 90%), so the equipment usually needs to be equipped with 10,000 to tens of thousands of L / s large high vacuum pump. Among traditional vacuum pumps, the only high vacuum pumps that can meet the above requirements are oil diffusion pumps and cryogenic pumps. However, the former has high energy consumption and serious oil vapor pollution, which affects product quality; the latter is expensive, and the adsorption surface (composed o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/56C23C14/35C23C16/54
Inventor 储继国龚建华
Owner SHENZHEN UNIV
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