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Low-carbon, oil-free high-speed vacuum pumping unit

A vacuum pumping and unit technology, applied in vacuum evaporation coating, mechanical equipment, machine/engine, etc., can solve the problems of serious oil vapor pollution, high power consumption, high energy consumption, eliminate oil vapor pollution, reduce pumping The effect of reducing gas energy consumption and improving the quality of vacuum products

Active Publication Date: 2019-07-12
储昕
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] 1. Large oil vapor pollution: Diffusion pump uses oil vapor jet flow to pump air, oil vapor pollution is serious, affecting the quality of vacuum products
[0004] 3. High energy consumption: a diffusion pump exhaust unit with tens of thousands of L / s consumes as much as 300,000 to 500,000 kWh / year

Method used

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  • Low-carbon, oil-free high-speed vacuum pumping unit
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Examples

Experimental program
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Effect test

Embodiment 1

[0026] Embodiment 1: A low-carbon, oil-free high-speed vacuum pumping unit assembled in two vacuum housings by an oil-free vacuum pump

[0027] Such as figure 1 As shown, a low-carbon, oil-free and high-speed vacuum pumping unit provided in Embodiment 1 of the present invention includes a vacuum chamber 11, and the vacuum chamber 11 is connected with a rough pump unit 12, a vacuum housing 13, and a chemical adsorption pump unit respectively. 14. The purge valve 15 is connected to the vacuum gauge 16, a first vacuum valve 17 is provided between the vacuum chamber 11 and the roughing pump unit 12, a second vacuum valve 18 is provided between the vacuum chamber 11 and the vacuum housing 13, and the vacuum A cryogenic water vapor pump 19 is arranged above the inside of the housing 13, and a radial flow pump unit 110 is arranged at the bottom of the inside of the vacuum housing 13. The exhaust port is connected to the backing pump 111 through the third vacuum valve 112. A fourth v...

Embodiment 2

[0041] Embodiment 2 A low-carbon, oil-free, high-speed vacuum pumping unit assembled in the same vacuum housing by an oil-free vacuum pump

[0042] Such as figure 2 As shown, a low-carbon, oil-free and high-speed vacuum pumping unit provided in Embodiment 2 of the present invention includes a vacuum chamber 21, and the vacuum chamber 21 is connected with a rough pump unit 22, a vacuum housing 23, and an air release valve 24 respectively. It is connected with the vacuum gauge 25, a first vacuum valve 26 is provided between the vacuum chamber 21 and the roughing pump unit 22, a second vacuum valve 27 is provided between the vacuum chamber 21 and the vacuum housing 23, and the vacuum housing 23 is provided by the following A radial flow pump unit 212, a chemical adsorption pump unit 28, and a cryogenic water vapor pump 29 are provided in sequence upwardly. The radial flow pump unit 212 is composed of four radial flow pumps connected in parallel for pumping air. Each radial flow ...

Embodiment 3

[0055] Embodiment 3 Oil-free vacuum pump sets are respectively installed in a vacuum housing, low-carbon, oil-free high-speed vacuum pumping unit

[0056] Such as image 3 As shown, a low-carbon, oil-free high-speed vacuum pumping unit provided in Embodiment 3 of the present invention includes a vacuum chamber 31, and the vacuum chamber 31 is connected with a rough pump unit 32, a chemical adsorption pump unit 33, and a cryogenic water vapor pump unit respectively. Pump 34, radial flow pump unit 35, air release valve 36 and vacuum gauge 37 are connected, a first vacuum valve 38 is provided between the vacuum chamber 31 and the rough pump unit 32, and a first vacuum valve 38 is provided between the vacuum chamber 31 and the chemical adsorption pump unit 33. The second vacuum valve 39, the third vacuum valve 310 is arranged between the vacuum chamber 31 and the cryogenic water vapor pump 34, the fourth vacuum valve 311 is arranged between the vacuum chamber 11 and the radial flo...

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Abstract

A low-carbon oil-free vacuum air pump unit with a high pumping speed comprises multiple vertical composite runoff molecular pumps, a cryogenic water vapor pump (19), and a chemisorption pump unit (14). A pumping speed comparable to that of a conventional diffusion pump is achieved. The vacuum air pump unit specifically comprises a vacuum chamber (11) separately connected to a rough pump unit (12), a vacuum housing (13), the chemisorption pump unit (14), a vent valve (15), and a vacuum gauge (16). A first vacuum valve (17) is disposed between the vacuum chamber (11) and the rough pump unit (12). A second vacuum valve (18) is disposed between the vacuum chamber (11) and the vacuum housing (13). The cryogenic water vapor pump (19) is disposed in an upper position inside the vacuum housing (13). A runoff pump unit (110) is disposed in a lower position inside the vacuum housing (13), and a vent port thereof is connected to a prior-stage pump (111) by a third vacuum valve (112). A fourth vacuum valve (113) is disposed between the vacuum chamber (11) and the chemisorption pump unit (14). The vacuum air pump unit reduces pumping energy consumption, shortens pumping time, and eliminates oil vapor pollution.

Description

technical field [0001] The invention belongs to the field of vacuum technology, in particular to a low-carbon, oil-free and high-speed vacuum pumping unit. Background technique [0002] The traditional diffusion pump has the advantages of high pumping speed, low price and convenient maintenance. It has been the mainstream pump type for large-scale industrial high vacuum equipment for decades. However, the diffusion pump has the following disadvantages: [0003] 1. Large oil vapor pollution: Diffusion pump uses oil vapor jet flow to pump air, and oil vapor pollution is serious, which affects the quality of vacuum products. [0004] 3. High energy consumption: A diffusion pump exhaust unit with tens of thousands of L / s consumes as much as 300,000 to 500,000 kWh / year. [0005] Above-mentioned shortcoming is the difficult problem that needs to be solved urgently in current vacuum industry, but fails to overcome all the time. Contents of the invention [0006] The purpose of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/14F04B41/06F04D29/42F04D29/30C23C14/56
CPCC23C14/56F04B37/14F04B41/06F04D29/30F04D29/4206
Inventor 储昕
Owner 储昕
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