Integrated normal-closed PDMS micro-valve, preparation process thereof and micro-pump containing micro-valve

Abstract

The invention provides an integrated normal-closed PDMS micro-valve, comprising an upper glass sheet 1, a lower glass sheet 3 and a PDMS film 2 that is arranged between the two glass sheets; wherein the upper glass sheet 1 contains a sample cell only; the lower glass sheet 3 contains an air path control hole only; and a fluid passage and an air path control passage are formed on two surfaces of the PDMS film 2 respectively. In the normal-closed valve, the fluid passage and the air path control passage are not etched on the upper glass sheet and the lower glass sheet, but formed on two surfaces of the middle PDMS film respectively; furthermore, two glass sheets only contain the sample cell and the air path control hole respectively; wherein the PDMS film can be repeatedly prepared by the same template, and the glass sheets only need to be drilled simply, thus reducing the template preparation steps of complex and high cost during the preparation process of the chip, thereby being more suitable for preparing the micro-fluidic chip of the integrated PDMS micro-valve / micro-pump.

Description

technical field [0001] The invention relates to a microfluidic chip preparation technology in the field of microfluidics, and in particular provides an integrated normally closed PDMS microvalve, a preparation process thereof, and a micropump composed of the microvalve. Background technique [0002] The microfluidic chip integrates or basically integrates the basic operation units such as sample preparation, reaction, separation, detection, cell culture, sorting, and lysis involved in the fields of chemistry and biology into a piece of several square centimeters (or even smaller). On the chip, a network of microchannels is formed to run through the entire system with controllable fluids, which is a technical platform that replaces various functions of conventional chemical or biological laboratories. Microfluidic chips are one of the most important cutting-edge technologies in the 21st century. [0003] In the past ten years, the microfluidic analysis system has developed f...

AI Technical Summary

Problems solved by technology

Although the micropump seal of the sandwich structure is relatively simple, the microfluidic channels on the glass and the channels for controlling the gas path need to be fabricated by traditional photolithography and wet etching processes

From the perspective of commercial batch preparation of chips and large-scale application prospects of microfluidic chips, the current normally closed valve structure is unfavorable in terms of manufacturing cost and manufacturing process.

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