Optical chip of array waveguide diffraction grating type optical multiplexer/demultiplexer circuit, waveguide substrate and method for fabricating optical chip array waveguide diffraction grating type

Abstract

The present invention provides an optical chip of array waveguide diffraction grating type optical multiplexer / demultiplexer circuit, waveguide substrate and method for fabricating optical chip array waveguide diffraction grating type pticalmultiplexer / demultiplexer circuit. A waveguide substrate has such a layout that array waveguide diffraction grating type optical multiplexer / demuliplexer circuits where the bending directions of the array waveguides are reverse to each other are arranged in combination, and the optical chip is cut out from that waveguide substrate. The inventive method for fabricating the optical chip can enhance the accommodation rate of optical chip, and can fabricate an optical chip having such a profile as stabilizing the optical characteristics of the array waveguide diffraction grating type optical multiplexer / demuliplexer circuit.

Description

technical field [0001] The present invention relates to an optical chip (optical chip) including an arrayed waveguide grating type optical multiplexing / demultiplexing circuit, a waveguide substrate on which patterns of a plurality of arrayed waveguide grating type optical multiplexing / demultiplexing circuits are formed, and an arrayed waveguide grating type optical multiplexing / demultiplexing circuit A manufacturing method of an optical chip for a wave splitting circuit. Background technique [0002] The arrayed waveguide diffraction grating optical multiplexing and demultiplexing circuit can perform multiplexing or demultiplexing of optical signals of different wavelengths. Therefore, it is used in optical multiplexers and optical demultiplexers for wavelength division multiplexing communication that can transmit a large amount of information. In order to miniaturize and mass-produce arrayed waveguide grating type optical multiplexing / demultiplexing circuits, input / output ...

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Problems solved by technology

[0006] However, in the case of an arcuate optical chip as in Patent Document 1, the physical stress caused by the optical fibers connected to the input / output waveguides at both ends concentrates on the central arrayed waveguide, and the shape of the optical chip is deformed to easily cause changes in optical characteristics.

[0007] Therefore, the optical chip of the conventional arrayed waveguide grating type optical multiplexing / demultiplexing circuit has a problem in optical chip yield when the shape is rectangular, and there is a problem in the stability of optical characteristics when the shape is arcuate.

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