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Piezoelectric/electrorheological mixed ultraprecise hydraulic step drive device

A stepping drive, electrorheological technology, applied in the direction of fluid pressure actuating devices, valve devices, engine components, etc., can solve problems such as restricting development, inability to meet higher-precision use requirements, and small output driving force. The effect of long life, large output load and fast response speed

Inactive Publication Date: 2009-08-26
JILIN UNIV
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AI Technical Summary

Problems solved by technology

Traditional stepper motors can no longer meet the requirements of higher precision
In recent years, the piezoelectric precision driver has gradually attracted people's attention due to its excellent performance. Although the piezoelectric precision driver has a certain output accuracy, due to the limitations of the mechanical structure itself, its output driving force is small, which has been restricting it. develop

Method used

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  • Piezoelectric/electrorheological mixed ultraprecise hydraulic step drive device
  • Piezoelectric/electrorheological mixed ultraprecise hydraulic step drive device

Examples

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Embodiment Construction

[0017] Pipeline 3 is fixedly connected to electrorheological valve one 4, electrorheological valve two 5, electrorheological valve three 6, electrorheological valve four 8 and electrorheological valve five 9, and the inlet and outlet of the valveless piezoelectric stack pump 7 of the driving source are the same , and be connected with the pipeline, the outlet one 12 of the pipeline is connected with the container one 2, the outlet two 13 of the pipeline is connected with the container two 10, the piston rod 1 is housed in the precision hydraulic cylinder 11, and the input and output pipeline of one side of the precision hydraulic cylinder is connected with the pipeline The outlet three 14 located between the first electrorheological valve 4 and the second electrorheological valve 5 is connected, and the input and output pipeline on the other side of the precision hydraulic cylinder is connected with the outlet four 15 on the pipeline.

[0018] The electro-rheological valve adop...

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Abstract

The invention relates to an ultraprecise hydraulic step drive device, belonging to a step drive device which uses a valveless piezoelectric stack pump and an electrorheological valve to drive and control a precise hydraulic cylinder. Electrorheological fluid flows in pipelines; five electrorheological valves are distributed on each pipeline; and the valveless electrorheological valve outputs precise pulse power to realize drive to the precise hydraulic cylinder. The system can realize forward and reverse precise step drive of the hydraulic cylinder. The device has the advantages of high output displacement resolution, quick response speed, large output load, low noise and long service life, and has significant value in the field of precise drive. The invention relates to a piezoelectric / electrorheological mixed ultraprecise hydraulic step drive device.

Description

technical field [0001] The piezoelectric / electrorheological hybrid ultra-precision hydraulic stepping drive device of the invention belongs to the field of precision electronic machinery. Background technique [0002] With the development of modern science and technology and industrial technology, especially the development of micro / nano technology, in the field of silicon microelectronics processing, in the field of micro robot operation, in the field of ultra-precision cutting, in the fields of optical fiber, optical adjustment and biomedicine, people High-tech technologies with ultra-precision drives are increasingly required to achieve ultra-precise positioning, displacement and movement. Traditional stepper motors can no longer meet the requirements of higher precision. In recent years, the piezoelectric precision driver has gradually attracted people's attention due to its excellent performance. Although the piezoelectric precision driver has a certain output accuracy...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F15B15/18F15B13/02F16K13/00
Inventor 曹周礼李建桥刘建芳赵宏伟曲兴田
Owner JILIN UNIV
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