Decoupling micromechanical gyroscope

Abstract

The invention provides a decoupling micro-machine gyro, which comprises a glass substrate (1), a metal electrode (8) that covers the surface of the glass substrate (1), a movable central mass block (2) that is connected with a drive comb tooth structure (3) by an inside detection supporting beam (13) and with a detection comb tooth structure (4) by an inside drive supporting beam (14). The gyro is characterized in that the central mass block (2) and the metal electrode (8) are in a grate shape and therefore, when a capacitor with the detection comb tooth structure changes, a capacitor between the central mass block (2) and the metal electrode (8) also changes, thus causing the gyro to be capable of detecting the increased capacitance quantity at work and improving the sensitivity of the gyro.

Description

technical field [0001] The invention relates to an angular velocity sensor, in particular to a decoupling micromechanical gyroscope. Background technique [0002] Micromachined gyro is an angular velocity sensor developed on the basis of silicon micromachining technology, which uses Coriolis force to measure the rotational angular velocity of an object. Compared with traditional angular velocity sensors, micromechanical gyroscopes are smaller in size, lighter in weight, and lower in cost. At the same time, they also have many advantages such as high reliability, strong resistance to vibration and shock, mass production, and low price. Aerospace, robotic automatic control, inertial navigation, weapon guidance, automobiles, consumer electronics and other fields have very broad application prospects. [0003] When the micromechanical gyro is working, the mechanical coupling of the two modes of driving and detection will seriously affect the performance of the gyro. The solutio...

AI Technical Summary

Problems solved by technology

[0004] However, the micromechanical gyroscopes introduced above all have the following defects: due to the limitation of the etching aspect ratio in the micromechanical manufacturing process, the thickness of the silicon chip is thin, so that the detection capacitance of the comb structure is small, and the capacitance change is also very small , it is difficult to measure, which limits the sensitivity of the gyroscope

In addition, the amplitude of the driving mode cannot be maintained constant, so it is difficult to accurately measure the angular velocity

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