A Curvature Sensor Based on Origami Structure

Abstract

The invention provides a curvature sensor based on an origami structure, the curvature sensor includes a flexible substrate (1), a metal pole plate (2), a first anchoring area of ​​a fixed beam (31), a second anchoring area of ​​a fixed beam (32 ), a double-end fixed support beam (4) with a folded film structure, the first folded film structure (52), the second folded film structure (53), the third folded film structure (51), the fourth folded film structure (54 ), planar inductance (6); when the flexible substrate is attached to a surface with a concave curvature, the structure uses a folded film structure based on the origami principle, so that the double-end fixed beam is folded to form a downward protruding The three-dimensional structure increases the capacitance change between the double-end fixed beam and the metal plate, so the curvature sensor has the advantages of high sensitivity, small measurement error, process compatibility, and novel structure.

Description

technical field [0001] The invention relates to a curvature sensor based on an origami structure, which belongs to the technical field of microelectronic devices. Background technique [0002] At present, there are three main methods for measuring the curvature. One is to use the change of the resistance value of the film material during the elongation or compression of the material to measure the degree of bending. The stability of the device is poor and the cost is relatively high; the second is to use the measurement The light intensity change after the fiber is bent is used to measure the degree of bending. The equipment is more complicated, not easy to carry, and the cost is too high; the third is to measure the degree of bending based on the change of capacitance during the bending process, and the sensitivity of this type of device is relatively low. . In recent years, with the continuous development of science and technology, it has become a development trend to stu...

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Problems solved by technology

[0002] At present, there are three main methods for measuring the curvature. One is to use the change of the resistance value of the film material during the elongation or compression of the material to measure the degree of bending. The stability of the device is poor and the cost is relatively high; the second is to use the measurement The light intensity change after the fiber is bent is used to measure the degree of bending. The equipment is more complicated, not easy to carry, and the cost is too high; the third is to measure the degree of bending based on the change of capacitance during the bending process, and the sensitivity of this type of device is relatively low.

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