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Seat excitation apparatus used for MEMS dynamic characteristics test

A technology of dynamic characteristics and bottom plate, which is applied in the direction of measuring device, vibration test, machine/structural component test, etc. It can solve the problems of high natural frequency, small structure size of MEMS micro devices, etc., and achieve the effect of prolonging the service life

Inactive Publication Date: 2009-07-08
DALIAN UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Due to the small structure size of MEMS micro-devices, usually between submillimeter and micron, and its natural frequency is high, the traditional method of directly stimulating the structure is no longer applicable.

Method used

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  • Seat excitation apparatus used for MEMS dynamic characteristics test
  • Seat excitation apparatus used for MEMS dynamic characteristics test

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Experimental program
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Effect test

Embodiment Construction

[0015] Specific embodiments of the present invention will be described in detail below in conjunction with technical solutions and accompanying drawings.

[0016] like figure 1 and figure 2 As shown, the micro-device 7 to be tested is directly bonded to the cross spring 6 on the top with glue, the adhesive should ensure as rigid a connection as possible between the micro-device 7 and the cross spring 6, and the cross spring 6 passes through the screw 8 Installed on the top of sleeve 11.

[0017] The pressure sensor 2, the lower connecting block 3, the steel ball 10, the upper connecting block 4, and the piezoelectric ceramic 9 are installed inside the sleeve, the bottom of the piezoelectric ceramic 9 is glued to the upper connecting block 4, and the top and the cross spring piece 6 Contact; by changing the thickness of the adjusting gasket 5, the cross spring piece 6 is deformed to exert an axial pretightening force on the piezoelectric ceramic 9;

[0018] The upper connec...

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Abstract

The invention discloses an exciting device for testing dynamic property of an MEMS microstructure or micro-device and belongs to a minitype mechanical electronic system. A structure of the device comprises that: a microstructure to be tested is arranged on a crossed spring strip of the top part; the crossed spring strip is arranged on the top part of a sleeve by a bolt; piezoelectric ceramics, an upper connecting block, a steel ball, a lower connecting block and a pressure sensor are arranged inside the sleeve; the bottom of the piezoelectric ceramics is fixed on the upper connecting block; the top part is contacted with the crossed spring strip to change the thickness of an adjustable washer; the piezoelectric ceramics is pressed by the crossed spring strip; the pressure sensor is arranged on a base plate; and the base plate and the sleeve are connected by a bolt. The exciting device has the advantages that in normal environment the device can carry out excitation on the MEMS microstructure, can remove shearing force produced in the using process of the piezoelectric ceramics and effectively prolong the service life of the piezoelectric ceramics through exertion of certain pretightening force on the piezoelectric ceramics at the same time; and the device can measure the output force of the piezoelectric ceramics by the pressure sensor, thereby conveniently seeking a frequency response function of the microstructure and obtaining dynamic property parameters of the microstructure.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronic systems, and relates to an excitation device for testing the dynamic characteristics of microstructures or microdevice. Background technique [0002] In recent years, micro devices made of MEMS technology have shown great advantages in terms of service life, reliability, cost, volume and weight, making them more and more widely used in civilian and military fields. For most micro-devices, the mechanical dynamic characteristics of the core movable microstructure directly determine its actual performance, so it is very necessary to test the mechanical dynamic characteristics of the movable microstructure. Similar to the dynamic characteristic test of the macroscopic mechanical structure, the dynamic test system of the MEMS microstructure also includes three basic links of excitation, vibration measurement and data processing. In order to realize the dynamic test, it is necessary ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M7/02B81C5/00
Inventor 佘东生王晓东张习文李晓轲王立鼎
Owner DALIAN UNIV OF TECH
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