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Erbium oxide hydrogen resistance coating and preparation thereof

An erbium oxide and coating technology, used in chemical instruments and methods, coatings, metal material coating processes, etc., can solve problems such as reducing stress and increasing bonding force, achieving good reliability, simple structure and process, and removal of Effects of unfavorable factors

Active Publication Date: 2009-07-01
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But the downside is: Er 2 o 3 grown in Al 2 o 3 In fact, there is no transition layer like the Fe-Al layer that acts as a buffer between the two materials to increase the bonding force and reduce the stress

Method used

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  • Erbium oxide hydrogen resistance coating and preparation thereof
  • Erbium oxide hydrogen resistance coating and preparation thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Example 1 Preparation of metal transition layer by radio frequency magnetron sputtering

[0030] The metal transition layer was prepared by radio frequency magnetron sputtering. First, CLAM is used as the matrix. Using ErFe with a diameter of 68mm 2 Target, the vacuum chamber is evacuated to 2.0×10 by mechanical pump and molecular pump in sequence -4 Pa. Then 20sccm of Ar gas is introduced, the sputtering pressure is adjusted to 0.5Pa, and the sputtering is carried out with a radio frequency power of 100W. The target base distance during sputtering is 55mm; when the substrate temperature is heated to 300°C, about 1 μm ErFe 2 transition layer.

Embodiment 2

[0031] Example 2 Preparation of Er by Reactive Radio Frequency Magnetron Sputtering 2 o 3 coating

[0032] Using pure Er target, using reactive radio frequency magnetron sputtering to prepare ErFe 2 Preparation of Er on the substrate of the transition layer 2 o 3 coating. Using the Er target with a diameter of 68mm, the vacuum chamber is evacuated to 2.0×10 by mechanical pump and molecular pump in sequence -4Pa. Then 20 sccm of Ar gas and 2 sccm of O 2 The mixed gas was used for reactive sputtering; the sputtering pressure was adjusted to 0.2Pa, and the RF power was 150W for sputtering. During sputtering, the target-base distance was 55mm, and the substrate heating temperature was 500°C. After 5 hours of sputtering, an Er of about 3 μm was obtained. 2 o 3 coating.

[0033] The structure of the prepared hydrogen barrier coating is as follows figure 1 shown. Among them, 1 is the base material; 2 is the metal transition layer prepared on the base material, in this case...

Embodiment 3

[0034] Embodiment 3 Measurement of resistivity of erbium oxide hydrogen barrier coating

[0035] At room temperature, the surface of the sample prepared in Example 2 and the steel substrate are used as two poles, different DC voltages are applied, the corresponding micro-current is measured, the insulation resistance is measured by the ratio of voltage / current, and the thickness and cross-sectional area of ​​the sample are calculated. Calculate the insulation resistivity.

[0036] Measured Er 2 o 3 The relationship between the insulation voltage and current of the coating is shown in Table 1. Measuring electrode area 0.314cm 2 , the insulation resistance rate is 5.02×10 under the converted 120V voltage 13 Ωcm, it can be seen that the prepared Er 2 o 3 The hydrogen barrier coating has high insulation resistivity.

[0037] Table 1

[0038] Voltage / V 60 70 80 90 100 110 120 Current / nA 0.040 0.053 0.09 0.12 0.12 0.23 0.25

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Abstract

The invention relates to a hydrogen resistant coating system and a preparation method thereof, in particular to a hydrogen resistant coating system containing Er2O3 and a preparation method thereof. The coating takes activated martensite steel or austenitic steel as a basal body on which Fe-Er is taken as a metal transition layer coated with Er2O3 coating. The preparation method comprises: preparing Fe-Er alloy on the basal body by a vapor phase deposition method, and preparing the Er2O3 layer on the metal transition layer by the vapor phase deposition method.

Description

technical field [0001] The present invention relates to a kind of hydrogen barrier coating and preparation method thereof, especially containing Er 2 o 3 Hydrogen barrier coating and its preparation method. Background technique [0002] Hydrogen-resistant coating materials are usually used in thermonuclear experimental reactors, and their role is to prevent tritium penetration, such as ensuring safe tritium levels in the environment and coolant in the liquid cladding system, preventing tritium from breeding agent to coolant, from Penetration into the environment from the pipeline. Its structure usually includes parts such as substrate and coating material. For the design requirements of hydrogen barrier and hydrogen isotope coating materials, it is necessary to meet the system operation requirements in the following aspects: good insulation resistivity, good hydrogen barrier performance, and good thermal expansion matching between the coating material itself and the subst...

Claims

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Application Information

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IPC IPC(8): C23C14/16C23C14/08C23C14/34C23C16/06C23C16/40C23C16/505B32B18/00B32B33/00
Inventor 李弢古宏伟汤梅杨旭东巨新
Owner GRIMAT ENG INST CO LTD
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