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Soft X-ray generating device, and destaticizer

A generation device and electron release technology, applied in the direction of X-ray tube electrodes, X-ray tubes, irradiation devices, etc., can solve the problem that it is difficult to use a surface light source to increase the area of ​​the generation surface, there are limitations, and there is a limit to the high output of X-ray volume, etc. problems, to achieve the effect of improving the vacuum degree drop, reducing the temperature rise, and improving the degree of freedom

Active Publication Date: 2013-04-03
TAKASAGO THERMAL ENG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0024] (1) There is a limit to the high output of X-ray dose due to the restriction of heat generation
[0025] (2) Due to the constraints of heat resistance, there are restrictions on the components that can be used for X-ray generating tubes
[0027] (4) It is difficult to use surface light source and increase the area of ​​the generating surface

Method used

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  • Soft X-ray generating device, and destaticizer
  • Soft X-ray generating device, and destaticizer
  • Soft X-ray generating device, and destaticizer

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Embodiment Construction

[0066] Next, preferred embodiments of the present invention will be described. figure 1 The plane and side cross-sections of the static elimination device 1 of the first embodiment are shown, and it can be seen from these figures that the static elimination device 1 of the present embodiment has a box shape as a whole.

[0067] The frame 2 serving as a vacuum container of the static eliminator 1 passes through six panels made of Al (aluminum), namely, a top panel 3, a bottom panel 4, a left panel 5, a right panel 6, a front panel 7, and a rear panel. 8 airtight combination to form. Frame 2 itself is grounded. Insulators 11 are respectively provided inside the left side plate 5 , right side plate 6 , front side plate 7 , and rear side plate 8 . In addition, an insulating plate 12 is provided on the upper surface of the base plate 4 , and an emitter 13 serving as an electron releasing portion is provided on the upper surface of the insulating plate 12 . A predetermined DC vo...

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Abstract

The present invention aims to suppress calorific value and prolong a lifetime of an apparatus that generates soft X-rays. Thus, the present invention provides a static elimination apparatus that includes an emitter as an electron emitting portion and a target, in which a thin film formed of diamond particles each having a particle size of 2 nm to 100 nm is formed on a surface of the emitter. The thin film has a diamond XRD pattern in an XRD measurement and, in a Raman spectroscopic measurement, a ratio of an sp3 bonding component to an sp2 bonding component within the film of 2.5 to 2.7:1. When a DC voltage is applied to the emitter, with a threshold electric field intensity of 1 V / μm or less, electrons larger in number than the prior art are emitted from the emitter and moreover, a temperature of the emitter is hardly increased, thus obtaining a longer lifetime.

Description

technical field [0001] The present invention relates to a soft X-ray generator and a static eliminator for removing static electricity from a charged object. Background technique [0002] For example, in semiconductor devices, glass substrates for FPDs, and other electronic component manufacturing equipment and production lines, these electronic components or the substrate are irradiated with long-wavelength (low-energy band) X-rays, that is, the wavelength is 1 Angstrom ( ) ~ hundreds of Angstroms of soft X-rays. [0003] In the static elimination device that irradiates soft X-rays as described above to eliminate static electricity, the X-ray generation method itself used is basically the same as conventional methods. [0004] That is, in a vacuum atmosphere, heating a filament as an electron release source to hundreds of degrees Celsius or higher, and applying a negative voltage to the periphery to release electrons is a general generation method. Since electrons are r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05G1/00G21K1/00G21K5/00G21K5/02H01J35/06H01J35/08H05F3/06
CPCH01J35/06H01J2235/081H05F3/06H01J2235/062H01J35/064H05G1/00
Inventor 稻叶仁大久保义典八木祥行佐藤俊一西村一仁
Owner TAKASAGO THERMAL ENG CO LTD
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