Non-contact type actuator

Abstract

The invention relates to a non-contact typed actuator which is arranged on a substrate, comprising a slab and a bushing; the non-contact typed actuator is characterized in that the ratio of the length and the width of the slab is from 0.55 to 0.59. When an external voltage is added, although the slab is bent for being attracted by the substrate, the slab is not contacted with the substrate. As no friction force between the slab and the substrate exists, the non-contact typed actuator only needs to apply extremely small voltage and consume minimum current to resist the reaction force generated by the attraction of static force of the slab and to carry out the bouncing action by an elastic tensile force generated when the slab recovers from a bent state; therefore, the non-contact typed actuator can reduce the driving voltage, reduce the electricity consumption and the abrasion of the component so as to prolong the service life.

Description

technical field [0001] The invention relates to a non-contact actuator. By increasing the bending rigidity of the plate, it avoids the contact between the plate and the substrate when it is attracted by the substrate, so as to reduce frictional resistance, reduce driving voltage, reduce current consumption, and reduce component wear to prolong the life of the actuator. life. Background technique [0002] The micro fan (Micro Fan) consists of two parts, one is a micro fan blade made of self-assembly technology (Self-assembly), and the other is a micro motor (micro-actuator) composed of a micro-actuator (Micro-actuator). Micro Motor). [0003] Among them, the action principle of the micro-actuator (Micro-actuator) is as follows: figure 1 Shown: [0004] The microactuator includes a substrate 10, the substrate 10 is generally a silicon substrate (Silicon Substrate), and coated with a silicon nitride (Silicon-Nitride) insulating film with a thickness of about 0.6 microns; the...

AI Technical Summary

Problems solved by technology

[0009] During the operation of the traditional actuator, there are two contact surfaces between the actuator and the substrate 10, one is the contact surface between the rear end of the plate 20 and the substrate 10, and the other is the contact surface between the bushing 21 and the substrate 10. The contact surface between them, and the condition that causes the actuator to have elastic tension is: the positive (negative) bias applied between the actuator and the substrate 10 must be large enough to promote the friction force of the bushing 21 on the substrate 10 greater than that of the flat plate 20 at the rear end of the substrate 10 friction, but this will inevitably lead to high driving voltage, large current consumption and component wear and other disadvantages

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