Darlington tube with high reliability for selsyn module and preparation method thereof

Abstract

The invention belongs to the technical field of semiconductor transistors and particularly relates to a high reliability Darlington transistor used for an autosyn module and a making method thereof. According to the technical proposal provided by the invention, the tube core comprises a preceding stage transistor base region and a backward stage transistor base region formed in a high resistance second epitaxial layer of a collecting zone, and the preceding stage transistor base region is internally provided with a preceding stage transistor emitting area, the backward stage transistor base region is internally provided with a backward stage transistor emitting area. The technical proposal is characterized in that the backward stage transistor base region beside the backward stage transistor emitting area is internally provided with a voltage protection ring, the surfaces of the same side of the high resistance second epitaxial layer of the collecting zone, the preceding stage transistor base region and the backward stage transistor base region, as well as the same side of the preceding stage transistor emitting area and the backward stage transistor emitting area, are provided with silicon dioxide films playing a role in protection; and a part corresponding to the preceding stage transistor base region is provided with a base aluminium layer of a base metal connecting wire above the silicon dioxide films. The product is characterized by big output current, high pressurization, stable output power, strong burn resistance, good sealing property, and the like.

Description

technical field [0001] The invention belongs to the technical field of semiconductor transistors, and in particular relates to a high-reliability Darlington tube for an auto-alignment machine module and a manufacturing method thereof. Background technique [0002] In the weapon equipment industry and industrial automation industry, HSBA5000 series high-power synchro / resolver amplifiers are mainly used in training simulators, remote control displays, artillery ignition control and naval relay systems to drive the normal work of the azimuth and angle motors. It is a compact modular structure, the required input signal is a 90V synchro signal or a 6.8V resolver signal, and its output signal is a high-power 90V synchro signal. The module is driven by the power provided by the reference source, with full protection functions: current limiting protection function to prevent damage caused by overload or short circuit; voltage clamp protection to prevent damage caused by reference s...

AI Technical Summary

Problems solved by technology

[0003] In order to meet the functional requirements of the general army-level auto-alignment machine module for the key component MJ10012 Darlington high-power tube, the electrical performance and reliability of the general Darlington high-power tube are far from being able to adapt, and it is necessary to invent and develop a current Large, high withstand voltage, high output power, strong burning resistance, airtightness test to meet the national military standard, high reliability and high power Darlington tube with stable electrical performance parameters at low temperature, normal temperature and high temperature

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