Anode bonding device
A technology of anodic bonding and pressurizing devices, which is applied in the direction of microstructure devices, processing microstructure devices, instruments, etc., and can solve problems such as complex structures, insignificant effects, and insufficient equipment functions
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0012] The present invention will be described in detail below with reference to the drawings and specific embodiments.
[0013] The anode bonding device of the present invention is such as figure 1 As shown, the vacuum chamber 1, the vacuum acquisition system 20, and the gas path interface 16 can achieve the vacuum and high-pressure specific atmosphere environment in the vacuum chamber 1, specifically: the vacuum system 20 evacuates the vacuum chamber, and a vacuum detection instrument 18 performs detection For the vacuum degree in the vacuum chamber, the vacuum obtaining system 20 can use a mechanical pump or a vacuum pump; for the high-pressure environment of a specific gas, vacuum is first performed, and then the specific gas is charged through the gas interface 16 and displayed by a high-pressure measuring instrument 19; The high-pressure measuring instrument is connected to the vacuum chamber 1 through a high airtight valve 17, and the high-pressure measuring instrument is ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com