Thin film material micro- stretching test system
A testing system and thin-film material technology, applied in the direction of analyzing materials, measuring devices, instruments, etc., can solve problems such as inappropriate measurement of deformation, plastic deformation of rigid beams, complex sample preparation, etc., achieve low cost, overcome experimental errors, Reliable effect of mechanical parameters
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[0028] The embodiments of the present invention are described in detail below in conjunction with the accompanying drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following the described embodiment.
[0029] The whole system includes sample stage, sample structure, driving mechanism and measurement observation device. The sample structure is fixed on the sample stage, the right end is connected with the driving mechanism, and a part of the measurement and observation device is placed above the sample structure.
[0030] as attached image 3 And attached Figure 4 As shown in , the sample stage includes a metal base 7, an XYZθ mobile platform 8 and a vacuum adsorption table 9. The XYZθ mobile platform 8 is fixed on the anti-vibration table, and the vacuum adsorpti...
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