Carbon nano-tube thin film structure and preparation method thereof
一种碳纳米管薄膜、薄膜结构的技术,应用在纳米结构制造、定向碳纳米管、纳米技术等方向,能够解决不利碳纳米管性能、碳纳米管聚集成团、薄膜厚度不均等问题,达到良好机械强度及韧性、方便应用、体积比小的效果
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[0015] see figure 1 , the preparation method of the carbon nanotube thin film structure of the embodiment of the present invention mainly includes the following steps:
[0016] Step 1: providing a carbon nanotube array, preferably, the array is a super-aligned carbon nanotube array.
[0017] In this embodiment, the preparation method of the super-parallel carbon nanotube array adopts the chemical vapor deposition method, and its specific steps include: (a) providing a flat substrate, which can be a P-type or N-type silicon substrate, or a silicon substrate formed with The silicon base of oxide layer, present embodiment preferably adopts the silicon base of 4 inches; (b) uniformly form a catalyst layer on the base surface, this catalyst layer material can be selected iron (Fe), cobalt (Co), nickel (Ni) or one of alloys in any combination thereof; (c) annealing the above-mentioned substrate formed with a catalyst layer in air at 700-900° C. for about 30 minutes to 90 minutes; (...
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