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Automatization materials conveying system

A technology for conveying systems and materials, applied in the direction of conveyors, conveyor objects, mechanical conveyors, etc., which can solve problems such as blockage of conveying vehicles 30, speed reduction, and affecting the delivery efficiency of process products, so as to reduce manufacturing costs and improve delivery efficiency Effect

Active Publication Date: 2008-06-04
TAIWAN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the drastic reduction in the speed of the transport vehicle 30 often causes the transport vehicle 30 to be blocked on the track 20, thereby affecting the delivery efficiency of the process products.

Method used

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  • Automatization materials conveying system
  • Automatization materials conveying system
  • Automatization materials conveying system

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0035] see Figure 2A and Figure 2B , the automated material conveying system 100 of this embodiment can be applied to conveying process products in a semiconductor factory, and mainly includes a fire prevention passage 110, a first track 120, a second track 130, and a plurality of transport vehicles 140 ( Figure 2A and Figure 2B only shows a transport vehicle 140) and a plurality of fire doors 150 ( Figure 2A Only one fire door 150 is shown in .

[0036] The first track 120 is disposed in the fire escape passage 110 , and the first track 120 has a plurality of first gaps 121 . The plurality of first gaps 121 are spaced apart from each other by a predetermined distance d.

[0037]The second track 130 is disposed in the fire escape 110 , and the second track 130 is parallel to the first track 120 . The second track 130 has a plurality of second gaps 131 . The plurality of second gaps 131 are also spaced apart from each other by a predetermined distance d. It should b...

no. 2 example

[0045] In this embodiment, the same elements as those in the first embodiment are marked with the same symbols.

[0046] see Figure 4A and Figure 5 The biggest difference between the automated material delivery system 100' of this embodiment and the automated material delivery system 100 of the first embodiment lies in the different shapes of the fire doors.

[0047] like Figure 5 As shown, the fire door 150' of this embodiment has a generally lightning-shaped shape. At the same time, if Figure 4B As shown, the relative position of each first gap 121 and each second gap 131 must also correspond to the shape of each fire door 150'.

[0048] Likewise, each first gap 121 is inclined to the axle 141a of the first wheel 141 at a predetermined angle θ, and each second gap 131 is also inclined to the axle 142a of the second wheel 142 at a predetermined angle θ.

[0049] As for other components or features of this embodiment are the same as those of the first embodiment, in o...

no. 3 example

[0054] In this embodiment, the same elements as those in the first or second embodiment are marked with the same symbols.

[0055] see Image 6 The biggest difference between the automated material delivery system 100" of this embodiment and the automated material delivery system 100' of the second embodiment lies in the structure of the fire doors.

[0056] like Image 6 As shown, the automated material delivery system 100" of this embodiment has a plurality of first fire doors 151 and a plurality of second fire doors 152 ( Image 6 Only one first fire door 151 and one second fire door 152 are shown). The first fire door 151 and the second fire door 152 also have a substantially lightning-shaped shape respectively, and the relative position of each first gap 121 and each second gap 131 must be the same as that of each first fire door 151. corresponding to the shape. In particular, if Figure 4B and Image 6 As shown, each first fire door 151 is connected to the fire esc...

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Abstract

The invention provides an automatic material transmission system comprising a fireproof passage, a first railway, a second railway, a transfer car and a fireproof door, wherein, the first railway is arranged inside the fireproof passage and provided with a first gap , while the second railway is arranged inside the fireproof passage, which is paralleled with the first railway and provided with a second gap which is paralleled with the first gap; the transfer car is arranged on the first railway and the second railway, which is also provided with a first wheel and a second wheel which are separately rolling on the first railway and the second railway; the first gap and the second gap are inclined to the wheel axles of the first wheel and the second wheel at a predetermined angle; the fireproof door is in connection with the fireproof passage and selectively passes through the first gap and the second gap, so as to set up a closed fire district in the fireproof passage. The invention can not only satisfy the requirements of fire fighting laws, but also improve the transferring efficiency of process and product, so as to reduce producing cost.

Description

technical field [0001] The present invention relates to an automatic material delivery system, in particular to an automatic material delivery system capable of improving delivery efficiency. Background technique [0002] In general, an automated material handling system (AMHS) has been widely used in semiconductor factories, which can be used to transport process products and the like. In order to comply with the requirements of fire regulations, multiple fire separation areas must be established in the automated material delivery system to prevent the fire from spreading through the automated material delivery system when a fire breaks out in a certain area of ​​the semiconductor factory. in the entire semiconductor factory. [0003] see Figure 1A and Figure 1B , a known automatic material transfer system 1 mainly includes a fire escape passage 10, two parallel tracks 20, a plurality of transport vehicles 30 ( Figure 1A and Figure 1B Only one delivery vehicle 30) an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G37/00B65G35/00H01L21/677H01L21/00
Inventor 王惟正
Owner TAIWAN SEMICON MFG CO LTD
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