PMS-PZN-PZT piezoelectricity thick-film composite material

Abstract

The invention discloses a piezoelectricity thick film composite material for medical apparatus and other transducers. The wide application and development of the ultrasonic technique on medical diagnosis, industrial non-destructive detection and hydrophone put forward higher demands for performance of transducer material. The aim is to provide the piezoelectricity thick film material which has both advantages of body material and film material and larger driving force than that of the film, obvious piezoelectricity effect, low working voltage, wide applicable frequency range and compatibility with semiconductor integrated circuit. Preparation according to proportion (moore ratio) of material: Pb3O4 1.9mol, ZrO22.4mol, TiO2 2.4mol, MnO2 0.12mol, Sb2O30.12mol, ZnO0.28mol, Nb2O50.28, SrCO30.3mol. The preparation method is that the materials and little inorganic adhesive are taken to add into an organic carrier and stirred so that the powder is evenly dispersed into solution and forms a slip. The slip is brushed on the base plate with plated electrode, and the thick film is formed by drying and burning. As a result, the piezoelectricity thick film material is prepared by plating electrode and polarization. The invention is not limited to the embodiment and mainly applied in medical apparatus and other transducers.

Description

technical field [0001] The invention discloses a piezoelectric thick film composite material used for medical equipment and other transducers. Background technique [0002] With the increasing application of sensing technology in the fields of medicine and biology, piezoelectric sensor technology has gradually become a research hotspot in this field. Piezoelectric sensing transducers have great potential in the fields of molecular biology, disease diagnosis and treatment, and new drug development due to their characteristics of sensitivity, speed, and low cost. The wide application and development of ultrasonic technology in medical diagnosis, industrial non-destructive testing and hydrophones put forward higher requirements on the performance of transducer materials. [0003] The research on piezoelectric thin films began in the late 1960s and became a hot topic after the 1980s, and the United States has always been in a leading position. Compared with bulk materials, its...

AI Technical Summary

Problems solved by technology

Its disadvantages: the interface effect between the film and the electrode affects the performance of the device, and is easily affected by factors such as external electricity, light, heat and force. The driving force generated by the film is small, and the application is limited.