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Microelectronic machinery microwave frequency detector and its preparation method

A micro-electromechanical, microwave frequency technology, applied in the direction of frequency measurement devices, frequency to phase shift conversion, etc., can solve the problems of small signal amplitude, DC power consumption, etc., and achieve the effect of improving the dynamic range

Inactive Publication Date: 2007-10-24
SOUTHEAST UNIV
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  • Application Information

AI Technical Summary

Problems solved by technology

Traditional microwave frequency detectors are based on diodes, which have the disadvantages of consuming DC power and measuring relatively small signal amplitudes

Method used

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  • Microelectronic machinery microwave frequency detector and its preparation method
  • Microelectronic machinery microwave frequency detector and its preparation method
  • Microelectronic machinery microwave frequency detector and its preparation method

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Experimental program
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Embodiment Construction

[0036] Micro-electromechanical microwave frequency detector of the present invention is a kind of microwave instantaneous frequency on-line detector, is substrate with GaAs substrate, and specific embodiment is as follows:

[0037] A power divider a, a power combiner b, a coplanar waveguide transmission line e, and a fixed beam structure c are arranged on the substrate 1:

[0038] Power divider a and power combiner b are composed of port one 6, port two 7, port three 8, asymmetric coplanar stripline 9, and tantalum nitride resistor 2 composed of coplanar waveguides. Port one 6 passes through asymmetric coplanar Strip lines 9 are respectively connected to port two 7 and port three 8, and a tantalum nitride resistor 2 is connected between two asymmetric coplanar strip lines 9 connected to port two 7 and port three 8;

[0039] The fixed-support beam structure c is lined with gallium arsenide 1, and a CPW signal line 14 is provided in the middle of the substrate 1, and CPW ground ...

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Abstract

The invention relates to a micro electric mechanical microwave frequency checker, and a relative production, with simple structure, small amplitude of measuring signal, non direct-current power consumption, and easy integration. The checker uses gallium arsenide as a liner (1) arranged with a power distributor (a), a power synthesizer (b), a coplane waveguide line (e), and a fixing beam structure (c), wherein the object signal via the power distributor (a) generates two signals, to form an object signal and another object signal (Us1-Us2), the object signal Us1 is connected with the third port of the power synthesizer (b), the object signal Us2 via a section of a CPW line is connected to the second port of the synthesizer (b) in which port to obtain a first signal via the fixing beam structure (c) to obtain the phase shift phi of the microwave signal on the line with fixed length.

Description

technical field [0001] The invention proposes a microwave frequency detector based on micro-electro-mechanical system (MEMS) technology, which belongs to the technical field of micro-electro-mechanical systems. Background technique [0002] In microwave research, microwave frequency is an important parameter to characterize microwave signal characteristics, and the measurement of microwave frequency plays a very important role in microwave wireless application and measurement technology. Traditional microwave frequency detectors are based on diodes, which have the disadvantages of consuming DC power and measuring relatively small signal amplitudes. In the past 20 years, with the rapid development of MEMS technology, many MEMS structures and devices, such as fixed beam structures and MEMS switches, have been studied in depth, which make it possible to use MEMS technology to realize microwave frequency detectors. Contents of the invention [0003] Technical problem: The obj...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R23/12
Inventor 廖小平焦永昌
Owner SOUTHEAST UNIV
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