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Silicon fusion metallurgy purification ingot pulling integrated furnace

A technology of vacuum boiler and water-cooled furnace shell, which is applied in the direction of crystal growth, silicon compound, self-regional melting method, etc. It can solve the problems of low production efficiency, high energy consumption, and reduced product quality, and achieve the effect of improving quality and production efficiency

Inactive Publication Date: 2007-10-24
WUJIANG TIANDIREN VACUUM FURNACE
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Problems solved by technology

[0002] The current silicon smelting mainly has three processes: smelting, refining and ingot pulling; the vacuum boilers used are independent of each other. Since the production process does not use vacuum operation, it is easy to produce too many oxides and become impurities that cannot be removed, reducing the product quality. quality
Since it is not a continuous operation, the production efficiency is low and the energy consumption is large

Method used

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Embodiment Construction

[0007] The minimum vacuum degree in the production process will guarantee 4×10 -1 Pa, the pressure rise rate is guaranteed to be 0.67Pa / h. The melting furnace can add additives and raw materials in a vacuum state. The smelted raw materials can be directly flowed into the purification furnace under vacuum for purification. The purification furnace is purified by intermediate frequency heating and electron beam heating. The bottom of the furnace is equipped with a disk and a mechanism for removing impurities. The purified raw material directly enters the ingot pulling mechanism through the valve for ingot pulling, and there is an automatic impurity removal device. The ingot-drawing mechanism realizes automatic control, and the temperature of the silicon in the furnace pipeline determines the descending speed and the speed of rotation of the ingot-drawing mechanism.

[0008] The smelting part is equipped with a vacuum feeding device and a transfer bin, which can be used as a ...

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Abstract

The invention discloses a vacuum stove to purity silicon, which comprises the following parts: power, vacuum chamber, transmitting car, wherein three vacuum stove cavities of fusing part, purifying part and ingot mechanism are connected to form an integral from upward to downward under vacuum condition. The invention solves the integrated problem of continuous fusing, purifying and ingot moulding of silicon under vacuum condition, which improves the quality and manufacturing benefit.

Description

technical field [0001] The invention relates to a vacuum boiler, especially a vacuum boiler for purifying silicon. Background technique [0002] The current silicon smelting mainly has three processes: smelting, refining and ingot pulling; the vacuum boilers used are independent of each other. Since the production process does not use vacuum operation, it is easy to produce too many oxides and become impurities that cannot be removed, reducing the product quality. quality. Because it is not a continuous operation, the production efficiency is low and the energy consumption is large. Contents of the invention [0003] The object of the present invention is to provide an energy-saving, continuous vacuum boiler for the purification of silicon. [0004] In order to achieve the above purpose, the scheme adopted is: [0005] A vacuum boiler for purifying silicon, including a power supply, a vacuum chamber, and a transport vehicle, is characterized in that the three vacuum boi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/037C30B13/18
Inventor 李荣华
Owner WUJIANG TIANDIREN VACUUM FURNACE
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