Symmetrical straight beam structure condenser type micro-acceleration sensor and manufacturing method thereof
A technology of acceleration sensor and structural capacitance, which is used in the measurement of acceleration, velocity/acceleration/shock measurement, instruments, etc., can solve the problem of not being able to significantly reduce the cross-axis sensitivity and large lateral sensitivity of the device, so as to reduce the cross-sensitivity and simplify the process. , the effect of balancing thermal stress
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Embodiment 1
[0044] Embodiment 1 of the present invention relates to a structure of a micro-acceleration sensor, which is described in conjunction with FIG. 1 .
[0045] As shown in Figure 1(a), one end of the straight elastic beam 1 is connected to the top corner of the central mass 2 through a short beam 4, and the other end is connected to the external support frame 3 perpendicular to it. As shown in Figure 1(b), the micro-acceleration sensor structure includes a centrally symmetrical mass block 2, an external support frame 3, and eight vertically symmetrical straight elastic beams connected to the centrally symmetrical mass block 2 and the external support frame 3 1 and upper cover plate 27, lower cover plate 28. The mass block 2 is composed of the top mass block silicon chip 6 and the bottom mass block silicon chip 7, the straight elastic beam structure 1 is composed of the top elastic beam 22 and the bottom elastic beam 21, and the external support frame 3 is composed of the top supp...
Embodiment 2
[0057] Embodiment 2 of the present invention relates to another micro-acceleration sensor structure, which differs from Embodiment 1 in that the distribution of the straight elastic beams and the position of the capacitance gap are different.
[0058] As shown in Fig. 3(a), one end of the straight elastic beam 1 is connected to any position 5 along the side length of the central mass 2 except the top corner through the short beam 4, and the other end is connected to the external support frame 3 perpendicular to it. As shown in Figure 3(b), the micro-acceleration sensor structure includes a centrally symmetrical mass block 2, an external support frame 3, eight up-and-down symmetrical straight elastic beam structures 1 connected between the mass block 2 and the external support frame 3, and the upper and lower Cover plate 27, lower cover plate 28. The centrosymmetric mass block 2 is composed of the top mass block silicon chip 6 and the bottom mass block silicon chip 7, the strai...
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