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Artificial retina neural flexible microelectrode array chips and processing method thereof

A flexible array and microelectrode technology, which is applied in the interdisciplinary field of biomedical engineering and microelectromechanical systems, can solve the problem of less flexible optic nerve membranes, and achieve low impedance, excellent mechanical properties, and good long-term stability

Inactive Publication Date: 2007-08-01
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

[0007] At present, most of the researches of domestic and foreign scholars mainly focus on polyimide (Polyimide), and the reports about Parylene mostly focus on the test and analysis of material properties (Wu Liqun, Parylene conformal coating, Electromechanical Engineering, 2004 No. 20, No. 6, 51-53), its application fields are mainly coating and wrapping articles, but there are few applied researches on flexible optic nerve membrane

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  • Artificial retina neural flexible microelectrode array chips and processing method thereof
  • Artificial retina neural flexible microelectrode array chips and processing method thereof

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Embodiment Construction

[0028] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029]The structure of the artificial retinal nerve flexible array microelectrode chip designed by the present invention is shown in Figure 1, which consists of a flexible substrate 1, a microelectrode sensor 2, a metal lead layer 3, a lead contact 4, a cable lead 5 and an adapter 6. On the flexible substrate 1, several micro-electrode sensitive elements 2 composed of Ti / Pt composite metal materials are arranged into a micro-electrode array, and the metal lead layer 3 drawn from each micro-electrode sensitive element 2 is connected to the lead contact 4, and finally through the cable The lead wire 5 is connected to the transfer interface 6 .

[0030] The material of the flexible substrate 1 is Parylene, and its size is 3000-4000 μm in length, 1000 μm in width, and 5-10 μm in height; on the flexible substrate 1, several microelectrode sensiti...

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Abstract

The invention discloses a flexible array micro-electrode chip of artificial retinal nerve and making method, which comprises the following steps: adopting poly-p-xylene as flexible base; making several micro-electrode sensitive elements; synthesizing micro-electrode array and micro-cable lead, lead contact and switching interface; constituting the product.

Description

technical field [0001] The invention relates to an artificial retinal nerve flexible array microelectrode chip and a manufacturing method thereof. The microelectrode chip is designed according to the principle that the sclera in the vitreous of the eyeball or the optic nerve generates visual signals after being electrically stimulated, and is prepared by micro-electromechanical processing technology. The key technology of artificial retina belongs to the interdisciplinary field of biomedical engineering and microelectromechanical system (MEMS). Background technique [0002] The artificial retinal nerve flexible array microelectrode chip is a kind of flexible material as the base, with multiple arrayed metal material microelectrode units on the surface, which can be implanted in the body, dock with the optic nerve, transmit electrical information, and stimulate the optic nerve to restore visual function. A neural microelectrode chip. Traditional microelectrodes are currently...

Claims

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Application Information

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IPC IPC(8): A61F9/00A61F2/14H01L21/00
Inventor 惠春徐爱兰李博任秋实
Owner SHANGHAI JIAO TONG UNIV
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