Preware measuring method based on linear phase position reversal development
A technology of wavefront measurement and linear phase, applied in the field of optical information measurement, can solve problems such as error of wavefront detection results, reduction of light energy utilization, and inconsistent performance
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[0078] Such as image 3 As shown, the wavefront sensor used in the method of the present invention is composed of a diffraction imaging optical system, a focal plane imaging device (such as a CCD camera), an image acquisition card, and a computer, and is characterized by the Zernike polynomial commonly used in the field of wavefront aberration measurement The optical wavefront distortion at the entrance pupil that is disturbed by the atmosphere, the Zernike coefficients of the aberrations to be measured are arranged in a predetermined order (generally in the order of spatial frequency from low to high) as a vector a, the purpose of wavefront measurement That is, the value of the coefficient vector a corresponding to the aberration to be measured is obtained.
[0079] The wavefront distortion φ(x,y) to be measured is imaged on the focal plane after passing through the diffraction imaging optical system. A CCD camera is placed near the focal plane to record the far-field image of the...
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