Preware measuring method based on linear phase position reversal development
A wavefront measurement and linear phase technology, applied in the field of optical information measurement, can solve the problems of reducing light energy utilization, weak incident light energy, inconsistent performance, etc.
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[0078] like image 3 As shown, the wavefront sensor used to realize the method of the present invention is composed of a diffractive imaging optical system, a focal plane imaging device (such as a CCD camera), an image acquisition card, and a computer. The optical wavefront distortion at the entrance pupil of the atmospheric disturbance, and the Zernike coefficients of each order of the aberration to be measured are arranged in a vector a according to the order agreed in advance (generally in the order of the spatial frequency from low to high). The purpose of wavefront measurement It is to obtain the value of the coefficient vector a corresponding to the aberration to be measured.
[0079] The wavefront distortion φ(x, y) to be measured is imaged on the focal plane after passing through the diffractive imaging optical system. A CCD camera is placed near the focal plane to record the far-field image of the distorted wavefront. The light intensity distribution information is c...
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