Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Semiconductor device and its making method

A semiconductor and manufacturing technology, applied in the field of sensor semiconductor devices and their manufacturing, can solve the problems of inability to form a dam structure, reduce adhesion, colloid overflow, etc., so as to avoid the weak dam structure and the seepage of the light-transmitting cover. Leakage problems, improved reliability, reduced size effects

Inactive Publication Date: 2009-01-21
SILICONWARE PRECISION IND CO LTD
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] In the above-mentioned prior art, the dam structure formed by the colloid laid on the welding wire needs to be responsible for the retaining wall and the glue at the same time, for the subsequent direct fixation of the light-transmitting layer on it, so the colloid must have a certain rigidity on the one hand. To form the required dam structure, it is usually necessary to add fillers to the colloid to strengthen the structural strength, which will reduce the adhesion between the colloid and the light-transmitting layer. On the other hand, if you want to increase the colloid and the light-transmitting layer Adhesiveness, that is, it is necessary to reduce the amount of filler in the colloid, but in this way, it may not be possible to form a rigid dam structure, resulting in leakage of the light-transmitting layer and affecting product reliability
[0011] Furthermore, when the light-transmitting layer is fixed on the colloid covering the welding wire, it is necessary to press the light-transmitting layer on the colloid before the colloid is not fully cured. In this way, when pressing, because the colloid has not yet Complete curing may cause pressure loss or even breakage of the welding wire
[0012] In addition, in the above-mentioned prior art, when laying the colloid, because the colloid is a coated wire and its height is greater than the thickness of the sensor chip, the problem that the colloid overflows to the active surface of the sensor chip often occurs, resulting in Problems such as pollution of the sensing area on the active surface of the sensor chip, resulting in waste products
[0013] Therefore, how to provide a sensing semiconductor device and its manufacturing method, which has a strong dam structure and does not reduce the adhesion with the light-transmitting layer, can avoid problems such as leakage and poor reliability, and will not cause welding lines The pressure loss and the contamination of the sensing area of ​​the sensor chip are indeed issues that need to be faced urgently in related fields.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Semiconductor device and its making method
  • Semiconductor device and its making method
  • Semiconductor device and its making method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] see Figure 5A to Figure 5D , which is a schematic cross-sectional view of the fabrication method of the semiconductor device of the present invention. It is also illustrated by taking mass production of the sensing semiconductor device of the present invention in a batch manner as an example. Of course, if the actual manufacturing process permits, the sensing semiconductor device of the present invention can also be produced in a single-chip manner.

[0034] Such as Figure 5A As shown, a substrate module sheet 51A having a plurality of substrates 51 is provided, and at least one sensor chip 50 is mounted on the substrate 51 , and the planar size of the sensor chip 20 is smaller than the planar size of the substrate 51 . The form of the substrate module 51A can be arranged in a matrix or in a strip; the sensor chip 50 has an active surface 501 and a relative non-active surface 502, and the active surface 501 of the sensor chip 50 is provided with a sensor In the sens...

Embodiment 2

[0041] Please also refer to FIG. 6A to FIG. 6D , which are schematic cross-sectional views of Embodiment 2 of the manufacturing method of the semiconductor device of the present invention. In Example 2, the semiconductor device is made by a method similar to the above, the main difference is that after laying the second insulating layer on the insulating layer, an adhesive layer is formed on the second insulating layer to connect the light-transmitting cover body.

[0042] As shown in FIG. 6A , a substrate module sheet 61 having a plurality of substrates 61 is provided, and at least one sensor chip 60 is mounted on the substrate 61 , and the planar size of the sensor chip 60 is smaller than the planar size of the substrate 61 . The form of the substrate module sheet 61A can be arranged in a matrix or in a strip; the sensor chip 60 has an active surface 601 and a relative non-active surface 602, and the active surface 601 of the sensor chip 60 is provided with a sensor In the ...

Embodiment 3

[0047] Please also refer to FIG. 7 , which is a schematic cross-sectional view of Embodiment 3 of the semiconductor device of the present invention.

[0048] The semiconductor device of the third embodiment is substantially the same as that of the second embodiment, and is mainly formed by the above-mentioned manufacturing method. The main difference is that the second insulating layer 732 disposed on the first insulating layer 731 corresponding to the sensor chip 70 When choosing to cover the bonding wires 72 , it should be noted that the second insulating layer does not extend to cover the sensing chip 70 , so as to avoid glue overflowing to the sensing region 703 of the sensing chip 70 .

[0049]Therefore, the semiconductor device and its manufacturing method of the present invention is to connect the sensing chip corresponding to each of the substrates on the substrate module sheet with a plurality of substrates, so that the sensing chip is electrically connected to the sub...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a semiconductor device and method, the semiconductor device includes: base plate, sensor chip which is connected with the base plate, weld line which can electric connected with sensor chip, insulated layer which covers the base plate, adhesion layer which is set on the insulated layer and transparent cover which is on the adhesion layer and covers the sensor chip. The semiconductor device and method of the invention can provide an image sensor capsulation with frivolity shortness property, at the time of increasing configuration intensity of the dam; it does not decrease the adhesion with later photic region, it forms perfect adhesion between dam structure and photic region, and without leakage problem, it also can avoid the problem of weld line damnification and rupture, at the same time the sensing area of the sensing chip will not be polluted when forming dam structure.

Description

technical field [0001] The present invention relates to a semiconductor device and its manufacturing method, in particular to a sensor semiconductor device and its manufacturing method. Background technique [0002] The traditional image sensor package (Image sensor package) is mainly to connect the sensor chip (Sensor chip) on a chip carrier, and after electrically connecting the sensor chip and the chip carrier through bonding wires, the A glass is covered above the sensing chip, and the image light can be received by the sensing chip. In this way, the completed image sensor package can be used by the system factory for integration on external devices such as printed circuit boards (PCBs) for digital cameras (DSC), digital video cameras (DV), optical mice, mobile devices, etc. Applications of various electronic products such as telephones and fingerprint readers. [0003] see figure 1 , U.S. Patent No. 6,060,340 proposes a sensing package, which is to place a pre-prepar...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/50H01L27/146H01L23/10H01L23/24
CPCH01L24/97H01L2224/48095H01L2224/48227H01L2224/8592H01L2924/15183H01L2924/15311H01L2924/16195H01L2924/00014
Inventor 张正易黄建屏王愉博黄致明萧承旭
Owner SILICONWARE PRECISION IND CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products