Manipulator device

Abstract

Herein disclosed is a robot arm mechanism (100) comprising a first arm link mechanism (110) and a second arm link mechanism (120), a robot arm driving mechanism 130 for driving the first arm link mechanism (110) and the second arm link mechanism (120), and a link retaining mechanism (140) for pivotably retaining the first arm link mechanism (110) and the second arm link mechanism (120), in which a third arm link (113) and a fourth arm link (114) of the first arm link mechanism (110) are kept forward in a first rotation direction (130a), in which the first arm link mechanism (110) and the second arm link mechanism (120) are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism (100) from being flattened out while the first arm link mechanism (110) and the second arm link mechanism (120) are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism (900).

Description

technical field [0001] The invention relates to a manipulator device with a telescopic arm, more specifically, a manipulator device with an arm drive mechanism capable of driving the manipulator to realize telescoping. Background technique [0002] At present, various conventional manipulator devices have been used in the manufacturing process of semiconductors, in which the manipulator is manipulated to make the arm telescopically move to work and process the workpiece. These workpieces, including wafers and other precision parts, are transferred by robotic devices and placed on work tables. [0003] A typical conventional robot device is disclosed in Japanese Patent Publication No. 2000-208588. Such as Figure 20 As shown, it includes a first arm linkage mechanism 910 , a second arm linkage mechanism 920 , a manipulator drive mechanism 930 and a link holding mechanism 940 . [0004] The first arm linkage 910 consists of a four-bar crank chain comprising a first arm link ...

AI Technical Summary

Problems solved by technology

[0012] However, the conventional manipulator 900 also has some disadvantages. The reason is that the first and second arm linkages 910, 920 and the link holding mechanism 940 composed of four-bar crank chains are easily crushed, so when the first arm The link mechanism 910 and the second arm link mechanism 920 extend to as Figure 20 Deformation occurs easily in the extended position shown

[0013] This means that when the first and second arm linkages 910, 920 are in the extended state, if the temperature changes, the first and second arm linkages of the conventional manipulator 900, which consist of a four-bar crank chain, will The rod mechanisms 910, 920 and the connecting rod holding mechanism 940 may be deformed and cannot make the transmission part 952 reach an accurate position, which affects the running accuracy of the conventional manipulator device 900

[0014] Another problem encountered by the conventional manipulator device 900 is that when the first and second arm linkage mechanisms 910, 920 are in an extended state, if an external force is disturbed, the first and second arm linkages composed of a four-bar crank chain will Mechanisms 910, 920 and connecting rod holding mechanism 940 may also be deformed, making it impossible for the conventional manipulator device 900 not to be affected by external forces, resulting in inaccurate positioning of the transmission part 952 and affecting the running accuracy

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