System for monitoring vibration-isolated foundation

Abstract

In a system for monitoring a vibration-isolated foundation, the system includes: an air pressure monitoring system for monitoring air pressure supplied to air mounts of the vibration-isolated foundation, wherein the air pressure monitoring system includes: a plurality of air ports configured to receive air to be supplied to the air mounts; a plurality of pressure sensors, each of the pressure sensors being configured to measure the pressure of the air supplied to a corresponding one of the air ports and to output the measured pressure as a sensing signal; a control unit configured to receive the sensing signal from each of the pressure sensors and to output a control signal according to a measured value of each of the pressure sensors; and a notification unit configured to operate according to the control signal of the control unit.

Description

CROSS-REFERENCE TO RELATED APPLICATON[0001]This application claims priority to and the benefit of Korean Patent Application No. 10-2018-0048730, filed on Apr. 26, 2018, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety.BACKGROUND1. Field[0002]Aspects of some example embodiments of the present disclosure relate to a system for monitoring a vibration-isolated foundation.2. Description of the Related Art[0003]Generally, keeping ambient vibrations to a minimum is very important for most equipment related to product production (e.g., measuring equipment, polishing devices, etc.) in the manufacture of ultra-precision products such as semiconductors and OLEDs. This is to ensure high quality of products. To this end, a vibration-isolated foundation using air mounts may be utilized. A technology that applies pneumatic springs as air mounts, for example, may be utilized as a technology related to a vibration-isolated founda...

AI Technical Summary

Benefits of technology

The patent relates to a system that can monitor the status of a vibration-isolated foundation, which helps to prevent problems such as incorrect air supply and damage to mechanical parts. This system can alert workers quickly to abnormal situations, which can improve safety and prevent accidents, and also enable quicker follow-up measures to ensure the reliability of leveling and vibration isolation operations. Overall, the system can help to ensure the safety and reliability of installed equipment and prevent malfunctions in real-time.

Problems solved by technology

However, with the above technology, there is a possibility that a worker in an upper part will fail to recognize an abnormality in pneumatic springs corresponding to air mounts or damage to the pneumatic springs arising from carelessness during unplanned work on a lower part.

Accordingly, this can cause an accident and significantly reduce the reliability of leveling and vibration isolation operations.

In addition, over-lifting caused by a displacement that exceeds a limit can seriously undermine the safety of workers and cause malfunction or damage of installed equipment.

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