Vacuum pump system

Abstract

A vacuum pump system comprising a plurality of vacuum pumps which are connected to one another in parallel and are each connected on an inlet side to a chamber, having an outlet line which is connected on the outlet side of the vacuum pumps, and an intermediate line which connects the inlet side of at least one vacuum pump to the outlet line, wherein all the vacuum pumps are connected in parallel during a pumping-out period and at least one of the vacuum pumps is connected in parallel with the other vacuum pumps as a backing pump during an idle period.

Description

BACKGROUND1. Field of the Disclosure[0001]The present disclosure relates to a vacuum pump system for evacuating a chamber, in particular a process or lock chamber.2. Discussion of the Background Art[0002]Vacuum pump systems for regularly evacuating large chambers are known from prior art, FIG. 1. Frequently, vacuum pumps operating in a dryly compressing manner are used for this purpose. As a rule, these are combinations of backing pumps, such as screw pumps, claw pumps or multi-stage Roots pumps, and parallel-connected Roots pumps. In large pump systems a plurality of pumps and a plurality of Roots pumps are connected in parallel.[0003]Typically such pump systems are used in lock chambers, for example loadlock or unloadlock, e. g. in coating plants. In these plants a chamber must be pumped down from atmospheric pressure to a transfer pressure of typically approximately 0.1 mbar to 10 mbar within a short period of time, e. g. a pumping-down period of 20 seconds to 120 seconds. Subseq...

AI Technical Summary

Benefits of technology

The patent describes a vacuum pump system that has multiple vacuum pumps connected in parallel and in series during the pumping process. This allows for high suction capacity without any loss of time. The system also consumes less energy, leading to increased lifespan of parts and reduced costs for air-conditioning and cooling. It allows for leak detection and reduces noise levels. The system is also highly redundant, meaning that even if one pump fails, the process can still be continued. Additionally, the system improves CO2 footprint and reduces operating costs.

Problems solved by technology

Consequently, during an idle and / or during a hold period an unnecessarily high energy expenditure of the pump is required.

In this case it is disadvantageous that the pumps become cold which has a negative effect on the service life of the components.

Further, linings may stick together and block the rotors.

These solutions are disadvantageous because of the large number of additional pumps.

Moreover, very small auxiliary pumps, such as ejector pumps, for example, cannot reduce the outlet pressure of the backing pump rapidly enough for attaining adequate power savings during short idle and / or hold periods.

Further, the auxiliary pumps require energy for operation.

This solution is disadvantageous due to the additional purchase and operating costs as well as the space required for the auxiliary pumps.

An additional expenditure for the pump system according to the disclosure is merely limited to relatively small dimensioned pipelines and switchover means, for example valves, as well as modifications to a pump control unit.

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