Microelectromechanical system (MEMS) and (MEM) optical interferometer for hyper-spectral imaging and analysis

Abstract

A microelectromechanical system (MEMS) (10), and a microelectromechanical (MEM) optical interferometer (18), for hyper-spectral imaging and analysis. System (10) includes matrix configured collimating micro lens (16), for receiving and collimating electromagnetic radiation (60) emitted by objects (12) in a scene or sample (14); microelectromechanical optical interferometer (18), for forming divided collimated object emission beam (72) having an optical path difference, and for generating an interference image exiting optical interferometer (18); matrix configured focusing micro lens (20); micro detector (22), for detecting and recording generated interference images; and micro central programming and signal processing unit (24). Applicable for on-line (e.g., real time or near-real time) or off-line hyper-spectral imaging and analyzing, on a miniaturized or ‘micro’ (sub-centimeter [1 cm (10 mm) or less], or sub-millimeter) scale, essentially any types or kinds of biological, physical, or/and chemical, (i.e., biophysicochemical) objects.

Description

FIELD OF THE INVENTION[0001]The present invention, in some embodiments thereof, relates to the fields of hyper-spectral imaging and analysis, and microelectromechanical systems (MEMS) and microelectromechanical (MEM) components thereof, and more particularly, but not exclusively, to a microelectromechanical system (MEMS) for hyper-spectral imaging and analysis, and a microelectromechanical (MEM) optical interferometer for hyper-spectral imaging and analysis.[0002]Exemplary embodiments of the present invention are generally applicable for on-line (e.g., real time or near-real time) or off-line hyper-spectral imaging and analyzing, on a miniaturized or ‘micro’ (sub-centimeter [1 cm (10 mm) or less], or sub-millimeter) scale, essentially any type or kind of biological, physical, or / and chemical, (i.e., biophysicochemical) object (entity, material, substance, or structure), wherein the object is composed or made up of essentially any type, kind, and number of species or components, whic...

AI Technical Summary

Benefits of technology

[0012]The present invention, in some embodiments thereof, relates to the fields of hyper-spectral imaging and analysis, and microelectromechanical systems (MEMS) and microelectromechanical (MEM) components thereof, and more particularly, bu

Problems solved by technology

However, such exemplary embodiments are limited in applications requiring or/and involving high speed high resolution hyper-spectral imaging and analyzing on a miniaturized or ‘micro’ (sub-centimeter [1 cm (10 mm) or less], or sub-millimeter) scale.

Main limitations relat

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