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Inertial sensor

a technology of inertial sensor and angular velocity, which is applied in the direction of acceleration measurement using interia force, turn-sensitive devices, instruments, etc., can solve the problems of inefficient angular velocity and inertial sensor technology configuration, and achieve the effect of improving the sensitivity of measuring acceleration

Inactive Publication Date: 2012-09-13
SAMSUNG ELECTRO MECHANICS CO LTD
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  • Abstract
  • Description
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AI Technical Summary

Benefits of technology

[0011]The present invention has been made in an effort to provide an inertial sensor capable of improving sensitivity for measuring acceleration by using a vibrating electrode in addition to a sensing electrode at the time of detecting the acceleration.

Problems solved by technology

As a result, there is a problem in that the technology configuration of the inertial sensor measuring the acceleration and the angular velocity is inefficient.

Method used

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Embodiment Construction

[0034]Various objects, advantages and features of the invention will become apparent from the following description of embodiments with reference to the accompanying drawings.

[0035]The terms and words used in the present specification and claims should not be interpreted as being limited to typical meanings or dictionary definitions, but should be interpreted as having meanings and concepts relevant to the technical scope of the present invention based on the rule according to which an inventor can appropriately define the concept of the term to describe most appropriately the best method he or she knows for carrying out the invention.

[0036]The above and other objects, features and advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings. In the specification, in adding reference numerals to components throughout the drawings, it is to be noted that like reference numerals designat...

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Abstract

Disclosed herein is an inertial sensor including: a driving body displaceably supported on a flexible substrate part in a floating state; a displacement detection unit having a sensing electrode detecting displacement of the driving body; a vibrating part having a vibrating electrode vibrating the driving body; a differential amplifier connected to the sensing electrode and the vibrating electrode, and a circuit unit connected to the differential amplifier to calculate acceleration and angular velocity, wherein the acceleration is calculated by using the sensing electrode and the vibrating electrode.

Description

CROSS REFERENCE TO RELATED APPLICATION[0001]This application claims the benefit of Korean Patent Application No. 10-2011-0021011, filed on Mar. 9, 2011, entitled “Inertial Sensor”, which is hereby incorporated by reference in its entirety into this application.BACKGROUND OF THE INVENTION[0002]1. Technical Field[0003]The present invention relates to an inertial sensor.[0004]2. Description of the Related Art[0005]Recently, since a compact and light inertial sensor is easily manufactured using an MEMS technology, the inertial sensor has been expanded to applications such as home appliances, etc.[0006]Therefore, with the continuous development of functions of the inertial sensor, the function of the inertial sensor is being continuously developed from a uniaxial sensor capable of detecting only an inertial force of a single axis using a single sensor to a multi-axis sensor capable of detecting an inertial force of a multi-axis having two axes or more using a single sensor.[0007]In more ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G01C19/56G01P15/18
CPCG01C19/5712G01P15/0922G01P2015/084G01P15/18G01P15/097G01P15/08
Inventor LIM, JUNYI, YU HEON
Owner SAMSUNG ELECTRO MECHANICS CO LTD
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