Diaphragm pump
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[0033] Illustrated embodiments are obtained by applying the present embodiments to a 4-valve diaphragm pump that the present applicant proposed the principle in Japanese Patent Application No. 2004-154991. One embodiment thereof will be described with reference to FIGS. 1 to 7. In one exemplary embodiment, the diaphragm pump has an upper housing 10, a lower housing 20, and a piezoelectric vibrator 30, and is in the shape of a flat rectangular parallelepiped as a whole. The upper housing 10 is composed of a blind plate 101 and a pump chamber plate 102, and all the blind plate 101, the pump chamber plate 102, and the lower housing 20 are molded articles made of a resin material.
[0034] The lower housing 20 is a member in the shape of a flat rectangular parallelepiped, which is most large-sized and has a complicate shape, among the molded articles. In the lower housing, a recessed part 20a for forming a pump chamber is formed so as to be open to the side opposing the piezoelectric vibr...
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