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High fill ratio reflective spatial light modulator with hidden hinge

a spatial light modulator and high fill ratio technology, applied in the field of spatial light modulators, can solve the problems of limited gap between the mirror and the support wall, and achieve the effects of reducing reducing the scattering and diffraction of light, and high fill ratio

Inactive Publication Date: 2006-04-20
MIRADIA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The present invention is a spatial light modulator (SLM) that uses a reflective micro mirror array to produce high quality images. The SLM has a unique design that eliminates scattering and diffraction of light, resulting in a high contrast ratio. The hinge and mirror plate are fabricated from a single substrate, which increases the strength and reliability of the SLM. The close spacing of the mirror plates and the hiding of the hinge allows for a high fill ratio and minimizes the scattering and diffraction of light. The net result is an SLM that can achieve high optical efficiency and performance to produce high quality images reliably and cost-effectively."

Problems solved by technology

With no translational displacement, the gap between the mirrors and the support walls are limited only by the fabrication technology and process.

Method used

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  • High fill ratio reflective spatial light modulator with hidden hinge
  • High fill ratio reflective spatial light modulator with hidden hinge
  • High fill ratio reflective spatial light modulator with hidden hinge

Examples

Experimental program
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Embodiment Construction

Detailed Description of the Preferred Embodiments

[0037] The reflective spatial light modulator (“SLM”) 100 has an array 103 of deflectable mirrors 202. Individual mirrors 202 can be selectively deflected by applying a voltage bias between that mirror 202 and a corresponding electrode 126. The deflection of each mirror 202 controls light reflected from a light source to a video display. Thus, controlling the deflection of a mirror 202 allows light striking that mirror 202 to be reflected in a selected direction, and thereby allows control of the appearance of a pixel in the video display.

Spatial Light Modulator Overview

[0038]FIG. 1 is a schematic diagram that illustrates the general architecture of an SLM 100 according to one embodiment of the invention. The illustrated embodiment has three layers. The first layer is a mirror array 103 that has a plurality of deflectable micro mirrors 202. In one preferred embodiment, the micro mirror array 103 is fabricated from a first substrate...

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PUM

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Abstract

A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.

Description

CROSS-REFERENCES TO RELATED APPLICATIONS [0001] The present application is a continuation of U.S. application Ser. No. 10 / 849,364, entitled “High Fill Ratio Reflective Spatial Light Modulator with Hidden Hinge,” filed May 18, 2004; which is a continuation of U.S. application Ser. No. 10 / 611,121, entitled “High Fill Ratio Reflective Spatial Light Modulator with Hidden Hinge,” filed Jun. 30, 2003, now abandoned; which claims priority from U.S. Provisional Application No. 60 / 475,404, entitled “Hidden Hinge High Fill Ratio Reflective Spatial Light Modulator,” filed Jun. 2, 2003. U.S. application Ser. No. 10 / 849,364 is also a continuation-in-part of U.S. application Ser. No. 10 / 378,056, entitled “Reflective Spatial Light Modulator,” filed Feb. 27, 2003, now abandoned; which claims the benefit of U.S. Provisional Application No. 60 / 390,389, entitled “Reflective Spatial Light Modulator,” filed Jun. 19, 2002. U.S. application Ser. No. 10 / 849,364 is also a continuation-in-part of U.S. applic...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G02B26/00G02B26/08
CPCG02B26/0841
Inventor PAN, SHAOHER X.
Owner MIRADIA INC
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