Fully-sealed high vacuum electron beam accelerating and scanning integrated structure
A high vacuum and electron beam technology, applied in the field of radiation processing, can solve the problems of unsatisfactory airtightness and poor structural rigidity, and achieve the effects of improving vacuum stability and effective utilization, improving rigidity, and possessing engineering practicability
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[0009] Referring to the accompanying drawings, the present invention includes an accelerating tube 1 , a drift tube 3 , a scanning electromagnet 5 and a scanning box 7 with a built-in ion pump 6 . The acceleration tube 1 adopts a standing wave acceleration structure with an exhaust port 11 that requires a high degree of vacuum. The scanning electromagnet 5 is placed around the top of the scanning box 7 and is connected with the drift tube 3 through the second flange 4 . The bottom of the scanning box 7 is fastened with the lead-out window 9 made of titanium foil material through the flange plate 3 10 . The upper end of the drift tube 3 is connected to the acceleration tube 1 through the flange one 2 . The flange one 2 between the acceleration tube 1 and the drift tube 3 is connected by welding with a thin-edged flange. The flange plate 2 4 between the drift tube 3 and the scanning box 7 is connected by welding with a thin-edged flange to ensure very high airtightness. The s...
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