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Apparatus, method and system for fabricating servo patterns on high density patterned media

一种图案化、高密度的技术，应用在图案的装置领域，能够解决劳动密集、不考虑数据岛制造效率、成本高等问题

Inactive Publication Date: 2007-04-25
HITACHI GLOBAL STORAGE TECH NETHERLANDS BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, regardless of the data island fabrication efficiency achieved with the dot mask method, the dot mask inherently limits the essential properties of the patterns that can be produced on the substrate.
Servo patterns are therefore made using a separate process that is time consuming, labor intensive and costly

Method used

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  • Apparatus, method and system for fabricating servo patterns on high density patterned media
  • Apparatus, method and system for fabricating servo patterns on high density patterned media
  • Apparatus, method and system for fabricating servo patterns on high density patterned media

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Embodiment Construction

[0042] The term "one embodiment," "an embodiment," or similar language throughout this specification means that a particular feature, structure, or characteristic described with respect to the embodiment is included in at least one embodiment of the present invention. Thus, appearances of the phrases "in one embodiment," "in an embodiment," and similar language throughout this specification may, but do not necessarily, refer to the same embodiment.

[0043] Furthermore, the described features, structures, or characteristics of the invention may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are disclosed to provide a thorough understanding of embodiments of the invention. However, one skilled in the art will appreciate that the present invention may be practiced without one or more of these specific details, or with other methods, components, materials, etc. In other instances, well-known structures, mate...

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Abstract

An apparatus, system, and method are disclosed for utilizing a 'shadow mask' approach to fabricate servo patterns on high density patterned media. The apparatus may include a deposition mask having a plurality of apertures generated by a conventional lithographic process. Material may be deposited onto a substrate through the deposition mask apertures from at least one deposition source oriented at unique deposition angles. In this manner, each aperture may correspond to multiple deposition locations. Apertures may be precisely dimensioned and positioned to create servo pattern features from the resulting deposition locations. The deposition mask may also include a plurality of bit pattern apertures adapted to direct a material to a plurality of deposition locations on the substrate, the deposition locations forming a bit pattern concurrent with formation of a servo pattern.

Description

technical field [0001] The present invention relates to apparatus, methods and systems for defining patterns on substrates, and more particularly to apparatus, methods and systems for fabricating servo patterns on high density patterned media. Background technique [0002] Hard drives provide data storage for data processing systems in computers and servers, and are becoming increasingly common in media players, digital recorders, and other personal devices. Advances in hard disk drive technology have enabled users to store very large amounts of digital information on increasingly smaller disks, and to selectively retrieve and change portions of this information almost instantaneously. In particular, recent developments have simplified hard disk drive manufacturing while simultaneously yielding increased track densities, thus advancing the ability to store more data at reduced cost. [0003] In hard disk drives, rotating high-precision aluminum or glass disks are coated on ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B5/84C23C16/04
CPCB82Y10/00G11B5/59688G11B5/743G11B5/59655C23C14/042C23C14/18C23C14/16
Inventor 托马斯·R·阿尔布雷克特兹瓦尼米尔·Z·班迪克
Owner HITACHI GLOBAL STORAGE TECH NETHERLANDS BV
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