Contactless three-axle air-float stage corner measuring device and its measuring method
A non-contact, angle measurement technology, applied in the field of measurement, can solve problems such as complex structures, and achieve the effect of simple system structure, easy implementation, and high-precision angle measurement
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[0035] Below in conjunction with accompanying drawing and specific embodiment, the present invention is described in further detail:
[0036] combine figure 1 , where each label represents: 1 is the measurement target, 2 is the micro green laser, 3 is the power system of the three-axis air bearing table, 4 is the control unit PC-104 of the air bearing table, 5 is the image acquisition card, 6 is Spherical air bearing, 7 is a color CCD camera, 8 is the power system of the three-axis air flotation table, 9 is the base of the three-axis air flotation table, and 10 is a compressed nitrogen cylinder.
[0037] The measurement system of the present invention includes: a measurement target, a miniature green laser, a color CCD camera, an image acquisition card, and an air-floor platform control unit PC / 104.
[0038] The measurement target uses red LEDs, which improves the contrast with the surrounding environment and avoids the influence of changes in ambient light conditions. Multip...
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