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Holding device for an optical element in an objective

A technology of optical components and devices, applied in optics, instruments, optomechanical equipment, etc., can solve problems such as exposure deterioration, damage to precision parts, deformation, etc.

Inactive Publication Date: 2007-01-31
CARL ZEISS SMT GMBH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0011] However, it has been found that the presence of liquid around the bottom of the projection system deforms the element which leads to a deterioration of the exposure
Liquid also entered the delivery system, which damaged or deformed the delicate components of the unit over time

Method used

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  • Holding device for an optical element in an objective
  • Holding device for an optical element in an objective
  • Holding device for an optical element in an objective

Examples

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Embodiment Construction

[0040] FIG. 1 shows a first embodiment of an objective designed as a lithography objective 1 and suitable especially for immersion lithography, but also for other types of lithography and also for other purposes. Since immersion lithography is known per se, this method will not be explained in detail here. The lithography objective 1 has a housing 2 , which is very schematically represented, and inside which a plurality of optical elements 3 are arranged in a manner known per se, although the number and arrangement of the optical elements is only schematic.

[0041] On the bottom of the housing 2 is mounted a base structure or base 4 which is secured to the housing 2, for example by bolts (not shown), so as to be detachably connected to said housing. Of course, other types of connections are also conceivable for connecting the base 4 to the housing 2 , by means of which the base 4 can be removed from the housing 2 . The base 4 serves to accommodate a terminal plate or termina...

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Abstract

A holding device (6) for an optical element (5) in an objective (1) has a mount (4) that is connected to the objective (1) , on the one hand, and at least indirectly to the optical element (5), on the other hand. Arranged between the mount (4) and the optical element (5) is a reinforcing element (8) whose coefficient of thermal expansion corresponds substantially to the coefficient of thermal expansion of the optical element (5).

Description

technical field [0001] The invention relates to a holding device for an optical element in an objective lens. The invention also relates to an objective lens, a lithographic apparatus and a method for connecting optical elements and stiffening elements in an objective lens. Background technique [0002] A holding device for an optical element refers to a terminal element in an objective, as is the case in lithographic objectives, corresponding lithographic objectives being known in the prior art. In the case of such projection objectives, in order to provide a non-adhesive connection between optical elements with associated mounts or mount-connected parts, the optical elements to be exchanged and the mounts or mount-connected parts are provided by means of surface matching The optical precision between the matching shapes. Such holding devices for terminal elements are theoretically suitable for routine applications in lithography. [0003] In an alternative, the boards a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/7095G03F7/70341
Inventor B·格尔里希A·武姆布兰德J·库格勒A·舍帕赫C·詹格林S·布鲁努格赫
Owner CARL ZEISS SMT GMBH
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