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Method and apparatus for receiving high stable energy filtering electronic microscopic image

A technology of energy filtering and electron microscopy, applied in energy spectrometers, circuits, discharge tubes, etc., can solve the problems of low actual energy resolution of localized electron energy loss spectrum, etc.

Inactive Publication Date: 2006-11-15
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the constraints of the existing technology, the actual energy resolution of the localized electron energy loss spectrum obtained with a series of energy-filtered images is lower than its theoretical energy resolution

Method used

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  • Method and apparatus for receiving high stable energy filtering electronic microscopic image
  • Method and apparatus for receiving high stable energy filtering electronic microscopic image
  • Method and apparatus for receiving high stable energy filtering electronic microscopic image

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Embodiment Construction

[0035] The specific embodiment of the present invention will be further described below in conjunction with accompanying drawing:

[0036] figure 1 It is a simplified schematic diagram of the principle structure for obtaining a high-stable energy filter electron microscope image receiving device. The device consists of an image source 11, an energy analyzer 10, a fast-response electron beam position detector 12, a detection feedback energy stabilizer 26, an energy selection slit 15, an image amplification and parallel receiving system 16, an energy filtering image controller 25, a central The controller 24 and the input device 33 are composed.

[0037] The electron beam emitted by the electron gun source 1 inside the image source 11 is transmitted through the sample 4 or reflected from the surface of the sample to obtain an electronic wave reflecting the information of the sample. The electron optical lens (group) focuses the electron wave into an image. electrons with diff...

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Abstract

This invention relates to high stable energy filtration digital microscopic imaging receives method and its equipment. It belongs to energy filtration digital microscopic imaging technique field. Drift detection feedback method is used to eliminate the drift of different energy digital space distribution to energy selecting crack caused by high voltage fluctuation or interference of electromagnetic wave. So the energy filtration receive device can keep the filtrated electron energy stable all the time during signal acquisition process. Then energy selecting crack width is adjusted to make energy segment that contain sample excitatory feature spectrum information. So the high space distinguishing and high energy distinguishing energy filtration image can be got after accumulation.

Description

technical field [0001] The invention relates to a method and device for receiving high-stable energy-filtered electron microscopic images, belonging to the technical field of energy-filtered electron microscopic imaging. Background technique [0002] In recent years, energy-filtering electron microscopy has become an important tool for scientific research in the field of materials. It is developed based on the electron energy loss spectroscopy technique. The chemical properties or physical structure information of the sample can be obtained by using the electron energy loss spectrometer to detect the inelastically scattered electrons after interacting with the sample. Energy-filtered electron microscopy combines this chemical or structural information with spatial information, and can quantitatively or qualitatively obtain surface distribution maps that reflect specific chemical properties or physical structure information in the sample. The spatial resolution of energy-fi...

Claims

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Application Information

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IPC IPC(8): H01J49/44H01J37/05H01J49/46
Inventor 王志伟袁俊许晨
Owner TSINGHUA UNIV
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