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Double-vibrating mode driving piezoelectric ceramic ultrasound wave electric machine small wave differential controlling method

A technology of ultrasonic motors and piezoelectric ceramics, applied in the direction of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc. Unable to achieve fast and accurate positioning and other problems, to achieve the effect of stable operation and easy open-loop control

Inactive Publication Date: 2006-10-18
HEFEI UNIV OF TECH
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Problems solved by technology

The step distance of the former is determined by the duration of the driving pulse. Because the pulse length is difficult to match the entire period of the driving wave, experiments have proved that the driving step is not constant, and fast and accurate positioning cannot be achieved in open-loop control; the driving range of the latter is too large. Small, only 300nm, can only be used for fine adjustment in closed-loop control
Even if the above three driving modes are used together, the "controllability" of speed and step distance is still not ideal, and it takes a long time to achieve satisfactory positioning

Method used

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  • Double-vibrating mode driving piezoelectric ceramic ultrasound wave electric machine small wave differential controlling method
  • Double-vibrating mode driving piezoelectric ceramic ultrasound wave electric machine small wave differential controlling method
  • Double-vibrating mode driving piezoelectric ceramic ultrasound wave electric machine small wave differential controlling method

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Embodiment

[0019] see figure 1 , A, B, and C are the three electrodes of the piezoelectric ceramic ultrasonic motor driven by dual vibration modes, where A, C form one set of electrodes, and B, C form another set of electrodes; x is the first-order longitudinal vibration mode , y is the first-order bending vibration mode, z is the elliptical motion trajectory of the driving head 1 composed of the first-order longitudinal vibration mode and the first-order bending vibration mode.

[0020] In the prior art, the sinusoidal voltage Vac of 39.6KHz is applied to the A, C electrodes or B, C electrodes respectively through the S1 and S2 direction switching switches to control the movement direction of the slider 2; and the movement speed of the slider 2 It is realized by controlling the size of Vac.

[0021] This embodiment adopts the wavelet differential control method, and the system configuration is as follows figure 2 As shown, the "waveform synthesis circuit" is used to generate the wave...

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Abstract

A method for controlling wavelet differential motion of piezoelectric ceramic ultrasonic motor driven by double vibration mode includes providing wavelet voltage with frequency of 39.6 KH2 in N number of periods, making peak value of at least one period be greater then dead zone, using said voltage as a driving element and controlling sliding block speed by changing its output rate, dividing said voltage to be two paths and adding them on two sets of electrodes on said motor in differential way, controlling voltage D-value of said electrodes so as to control amplitude of vibration mode for changing oval motion trail of driving head.

Description

Technical field: [0001] The invention relates to a variable-speed driving control method of a piezoelectric ceramic ultrasonic motor driven by dual vibration modes, in particular to a driving control method requiring nanometer-level positioning accuracy. Background technique: [0002] The piezoelectric ceramic ultrasonic motor driven by dual vibration modes is a new type of motor developed in recent years. Its advantages of fast, efficient, flexible control and simple structure make its application field continuously expand; because of its low output power and no pollution to the environment , Small size, continuous drive and step drive are integrated, so it is more suitable for the field of instruments and micro device processing machinery, these fields often have high requirements for positioning accuracy. There are two situations for driving: one is that the displacement length is known, which can achieve the required positioning accuracy through closed-loop control; the ...

Claims

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Application Information

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IPC IPC(8): H02N2/00H02N2/06H02N2/14
Inventor 徐从裕余晓芬范伟
Owner HEFEI UNIV OF TECH
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