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Electronic-grade dental gas purification process

An electronic grade, laughing gas technology, applied in the direction of nitric oxide, nitrogen oxides/oxyacids, etc., can solve problems that affect the quality of electronic products and production stability, high costs, and affect the development of the electronics industry, etc., to achieve safety Improved coefficient of performance, ease of operation, and strong operability

Inactive Publication Date: 2006-09-06
GUANGZHOU SENYIN GAS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, at present, the laughing gas required for production in the domestic electronics industry is replaced by low-purity laughing gas. If it is imported from abroad, it will cost a lot of money. The current price is 600 yuan / kg
As a result, it not only affects the quality of domestic electronic products and the stability of production, but also seriously affects the overall development of the domestic electronic industry.

Method used

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  • Electronic-grade dental gas purification process

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Experimental program
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Effect test

Embodiment Construction

[0013] Use low-purity laughing gas, its impurity content is: N 2 : 1000~2000PPM; H 2 O: 300~3000PPM; CO 2 : 50~500PPM.

[0014] Press the above-mentioned low-purity laughing gas figure 1 The process handles:

[0015] 1. Chemical purification - impurity treatment 1

[0016] Container shape: outer diameter 229MM, height 1100MM,

[0017] Chemicals: 30% NaOH,

[0018] 2. Chemical purification - impurity treatment 2

[0019] Container shape: outer diameter 229MM, height 1100MM,

[0020] Chemicals: solid NaOH alkali tablets

[0021] 3. Molecular sieve purification 1

[0022] Container shape: outer diameter 2109MM, height 1500MM,

[0023] The outside is heated with 4000KW resistance wire

[0024] Chemicals: 1 kg fine-pore silica gel at each end, coconut shell activated carbon in the middle

[0025] Remarks: When working, work at normal temperature, the pressure is controlled at 0.3 ~ 1MPA. During regeneration, the temperature is controlled at 250 degrees Celsius, dry nitr...

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Abstract

The invention relates to a refinement process for electronic grade laughing gas. Its flow process is as follows: laughing gas of low purityí·chemical purificationí·molecular sieve purification, heatingí·low temperature distillation for deeper purificationí·electronic grade laughing gas. The invention applies molecular sieve and low temperature distillation to remove impurity in laughing gas and produces raw laughing gas with wet-type heating method, so its safety coefficient is improved a lot, possesses the characteristic of unique craft, convenient operability and full localization of manufactures. Furthermore, it has the quality of advanced world level, replacing import goods and exporting abroad.

Description

technical field [0001] The invention relates to an electronic grade laughing gas purification process. Background technique [0002] Ultra-pure special electronic gas: Laughing gas is an important basic raw material in the fields of modern optoelectronics, microelectronics, large-scale integrated circuits, and optical fiber manufacturing. It is called the "food" or "source" of the IT industry. In a sense, without a reliable ultra-pure special electronic gas, optoelectronics and microelectronics will be "cooking without rice". Experience has proved that every time the purity of electron gas increases by an order of magnitude, its downstream products (IC) will have a qualitative leap. [0003] With the continuous development of my country's electronics industry, higher requirements are put forward for optoelectronics and microelectronics technology. High performance, multi-function, large capacity, miniaturization and batch production have become the inevitable trend of its d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B21/24
Inventor 肖启贤牟乃锋
Owner GUANGZHOU SENYIN GAS
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