Three dimensional integrated micro mechanical acceleration sensor and producing method
An acceleration sensor and acceleration sensing technology, applied in multi-dimensional acceleration measurement, acceleration measurement using inertial force, etc., can solve the problems of high paraxial sensitivity, signal output is prone to interference, etc., so that the production cost is not high and the final realization is easy Effect
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[0041] The substantive characteristics and remarkable progress of the present invention are further illustrated below through specific examples, but the present invention is by no means limited to the examples described.
[0042] Design and manufacturing process of a three-dimensional integrated high-shock acceleration sensor with a measuring range of 50,000 g:
[0043] 1. The structural size of the acceleration sensing element in the X and Y axis directions: the length of the cantilever beam is 515 μm, the thickness is 16 μm, and the width is 50 μm;
[0044] 2. The structural size of the acceleration sensing element on the Z axis: the thickness of the thin plate is 50 μm, the length is 50 μm, the thickness of the mass block is 370 μm, the total length of the mass block and the thin plate is 670 μm, and the width of the entire structure is 1400 μm.
[0045] The dimensions of the entire three-dimensional integrated high-shock acceleration sensor are: length 4100 μm, width 3500 ...
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