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Micromechanics measurer and measuring method

A test method and tester technology, applied to scientific instruments, using stable tension/pressure to test the strength of materials, instruments, etc., can solve the problems that affect the reliability of test results, the inability to obtain measurement accuracy, etc., and achieve the goal of improving resolution Effect

Inactive Publication Date: 2006-03-29
INST OF MECHANICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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Problems solved by technology

However, because the traditional material testing machine is driven by a motor, and its load measurement uses a strain gauge load sensor, these structural characteristics determine that this type of instrument cannot obtain a more ideal measurement when it is applied to the mechanical performance test of micro-scale samples. In addition, when measuring the tiny load (force) and displacement of micro-scale samples, the structural response of the instrument itself will seriously affect the reliability of the test results

Method used

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Embodiment Construction

[0031] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings:

[0032] figure 1 Shown is the composition block diagram of the micromechanics tester provided by the present invention, including a computer including a signal generation module and a signal acquisition module; a power amplifier with an input terminal electrically connected to the signal generation module; and a power amplifier The tester host is electrically connected to the output terminal, and the tester host feeds back the displacement signal and the load signal to the signal acquisition module of the computer.

[0033] In this embodiment, the signal generation module uses Altai’s PCI2007A, the signal acquisition module uses ADLINK’s DAQ2006, and the circuit diagram of the power amplifier is as follows Figure 6 As shown, among them: SYN-25-D12A switching regulated power supply, DM4C-DV20 is a three-and-a-half-digit digital panel meter, a...

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Abstract

The present invention relates to a micromechanics test instrument and its test method. Said test instrument includes a computer, said computer includes a signal generation module and a signal acquisition module, a power amplifier whose input end is electrically connected with signal generation module and a test instrument main machine for loading sample to be tested. Besides, said invention also provides the concrete steps of its test method.

Description

Technical field [0001] The invention relates to an instrument for testing the mechanical properties of micro-scale specimens, in particular, to an instrument for testing the mechanical properties of micro-scale specimens by means of stretching, bending, shearing, torsion, etc., and an instrument thereof testing method. Background technique [0002] The development of the microelectronic machinery (MEMS) industry urgently needs to reliably test the mechanical properties of microscale specimens. At present, the main instruments used for testing the mechanical properties of micro-scale samples are nanoindenters. This instrument is characterized by being good at indentation experiments on samples, that is, the indenter is pressed into a certain depth on the surface of the sample, According to the relevant mechanical model, the data is converted according to the loading and unloading curve of the test sample, and the mechanical parameters such as the hardness and modulus of the tested...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/08G01N3/00
Inventor 张泰华郇勇杨业敏
Owner INST OF MECHANICS - CHINESE ACAD OF SCI
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