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Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system

A high-acceleration, positioning system technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of large linear motion inertia, poor end effector stiffness, low positioning accuracy, etc., and achieve good kinematic performance and dynamics. The effect of high performance, large load capacity and high positioning accuracy

Active Publication Date: 2006-02-08
CHANGZHOU MINGSEAL ROBOT TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the existing motion positioning system in the field of IC / MEMS packaging adopts a series structure and has a large linear motion inertia of the base platform, which restricts the motion acceleration and speed of the entire system, and the effective load and work efficiency of the system are low. ; There are difficulties in the structural design of the decoupling device when using a parallel structure, which limits the further improvement of the system's motion performance; the multi-joint parallel linkage mechanism driven by a rotating motor has a stiffness difference in the vertical direction of the end effector, and only semi-feedback motion control can be used , a macro / micro-driven two-degree-of-freedom high-acceleration and high-precision parallel positioning system is provided for the problem of low positioning accuracy

Method used

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  • Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system
  • Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system
  • Macro/micro driven two-degree-of-freedom high-acceleration high-precision parallel positioning system

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Experimental program
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specific Embodiment approach 1

[0006] Specific Embodiment 1: This embodiment is described in conjunction with Fig. 1 and Fig. 2. This embodiment consists of a base 1, an X-axis linear drive device 2, a Y-axis linear drive device 3, an X-axis linear guide rail, a Y-axis linear guide rail, an X-axis Linear grating 4, Y-axis linear grating 5, X-axis guide rail support 6, Y-axis guide rail support 7, X-axis moving platform assembly 8, Y-axis moving platform assembly 9, X-axis end platform 10, Y-axis end platform 11. The X-axis parallel linkage mechanism 12, the Y-axis parallel linkage mechanism 13, the air bearing 14, and the end output platform 15 are composed; the X-axis guide rail support 6 and the Y-axis are respectively fixed on the opposite corners of the base 1 The guide rail support 7, the base 1 at the intersection of the axis of the X-axis guide rail support 6 and the axis of the Y-axis guide rail support 7 is fixed with an air-floating support 14, the upper end surface of the air-floating support 14 a...

specific Embodiment approach 2

[0007] Specific embodiment two: This embodiment is described in conjunction with Fig. 1 and Fig. 2. The X-axis linear guide rail of this embodiment consists of an X-axis upper left linear guide rail 16, an X-axis upper right linear guide rail 17, an X-axis lower left linear guide rail 18, and an X-axis linear guide rail. The right linear guide rail 19 on the lower layer of the axis; the left linear guide rail 16 on the upper layer of the X axis is fixed in the groove 6-1 at the upper left end of the X axis guide rail support 6, and the right linear guide rail 17 on the upper layer of the X axis is fixed on the X axis guide rail support 6 In the groove 6-2 at the upper right end of the X-axis, the left linear guide rail 18 of the lower layer of the X-axis is fixed in the groove 6-3 of the lower left end of the X-axis guide rail support 6, and the right linear guide rail 19 of the lower layer of the X-axis is fixed in the X-axis guide rail support In the lower right end groove 6-...

specific Embodiment approach 3

[0009] Specific embodiment three: This embodiment is described in conjunction with Fig. 1 and Fig. 2. The Y-axis linear guide of this embodiment consists of the Y-axis upper left linear guide 20, the Y-axis upper right linear guide 21, the Y-axis lower left linear guide 22, and the Y-axis linear guide 22. The right linear guide rail 23 of the lower layer of the axis is composed; the left linear guide rail 20 of the upper layer of the Y axis is fixed in the upper left end groove 7-1 of the Y axis guide rail support 7, and the right linear guide rail 21 of the upper layer of the Y axis is fixed on the Y axis guide rail support 7 In the upper right groove 7-2 of the Y axis, the left linear guide rail 22 of the lower layer of the Y axis is fixed in the groove 7-3 of the lower left end of the Y axis guide rail support 7, and the right linear guide rail 23 of the lower layer of the Y axis is fixed in the Y axis guide rail support In the lower right end groove 7-4 of seat 7. Adopting...

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Abstract

The invention relates to a parallel orientating system with two free degree, high acceleration, high precision and macro / micro dual driven. The mutually perpendicular X-shaft liner driven apparatus 2 and Y-shaft liner driven apparatus are fixed on the base 1; the X-shaft liner driven apparatus 2 is fastened with X-shaft moving platform assembly 8; the Y-shaft liner driven apparatus 3 is fastened with Y-shaft moving platform assembly 9; the X-shaft parallel linkage 12 is hinged between X-shaft moving platform assembly 8 and X-shaft end platform 10; the Y-shaft parallel linkage 13 is hinged between Y-shaft moving platform assembly 9 and Y-shaft end platform 11; the X-shaft end platform 10 and the Y-shaft end platform 11 are fastened with the end output platform 15.

Description

Technical field: [0001] The invention relates to a motion positioning system, which belongs to the technical field of industrial motion positioning, in particular to a parallel positioning system with two degrees of freedom, high acceleration and high precision driven by a macro / micro drive. Background technique: [0002] At present, the motion positioning system used in the field of integrated circuit (IC) and micro-electromechanical system (MEMS) packaging has the following problems: 1. The XY workbench method with series structure is adopted. Since the upper platform is the workload of the lower platform, the lower The linear motion inertia of the platform is large, which restricts the motion acceleration and speed of the entire system, and the effective load and work efficiency of the system are low; 2. The parallel structure XY table method needs to use a decoupling device for XY axis linear motion, and its structural design High stiffness and low friction are required,...

Claims

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Application Information

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IPC IPC(8): G01B21/02G01B11/02G01B5/02
Inventor 孙立宁刘延杰荣伟彬曲东升李娟
Owner CHANGZHOU MINGSEAL ROBOT TECH CO LTD
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