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Two-dimensional micro-force measuring sensors

A technology for measuring sensors and micro-forces, applied in the field of sensors, can solve the problem of low resolution of force measurement, and achieve the effects of easy implementation, simple structure, and guaranteed measurement accuracy and resolution.

Inactive Publication Date: 2005-07-27
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this adaptive floating structure realizes the three-dimensional free rotation of the friction head through a mechanical device, and the inherent frictional resistance of the bearing of the mechanical device directly causes the force measurement resolution to be low

Method used

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Embodiment Construction

[0014] The present invention will be further described below in conjunction with drawings and embodiments.

[0015] The two-dimensional micro-force measurement sensor of the present invention adopts an elastic body cantilever structure, such as figure 1 As shown, the vertical curved beam 2 and the horizontal curved beam 7 are respectively composed of two parallel elastic bodies, and the cube connecting block 3 connects the vertical curved beam 2 and the horizontal curved beam 7 perpendicular to each other in the length direction to form the main structure of the cantilever. The other end of the vertical curved beam 2 is connected to the fixed plate 1 to form a fixed constraint, and the other end of the horizontal curved beam 7 forms a cantilever free end. Four strain gauges 4 are symmetrically pasted on the front and back of any one of the horizontal curved beams 7 to form a full bridge circuit, and the position is close to the connecting block 3; another four strain gauges 8 ...

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Abstract

A transducer is featured as fixing one end of suspension arm and another end set with frictional head, forming both of vertical and horizontal bent beam by elastic body and sticking foil gauge on the elastic body to make it full bridge circuit. In frictional test, strain deformation of horizontal bent beam is caused by normal load and strain deformation of vertical one is caused by only frictional force so the load and frictional force can be measured out through strain detection.

Description

technical field [0001] The invention relates to a force measuring sensor, in particular to a two-dimensional micro-force measuring sensor for micro-friction testing using elastic body strain deformation, and belongs to the technical field of sensors. Background technique [0002] With the increasingly widespread application of micro-electromechanical systems (MEMS), the problems of friction and wear are becoming more and more prominent. Controlling and improving the surface characteristics of micromachines is an effective way to improve their microtribological properties. Surface nanofilms (or coatings) can greatly reduce the occurrence of wear and adhesion, thereby improving the service life of micromachines. Microfriction testing is of great significance for evaluating the tribological properties of lubricating films on these surfaces. The core of micro-friction testing is the measurement of micro-load and friction force, that is, micro-force measurement sensor. In the m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/22
Inventor 程先华王梁吴炬白涛
Owner SHANGHAI JIAO TONG UNIV
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