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Process for preparing ZrO#-[2]/perfluoropolyether composite lubrication thin film

A perfluoropolyether, lubricating film technology, used in lubricating compositions, petroleum industry, base materials, etc., to achieve the effects of good anti-adhesion performance, low toxicity and low price

Inactive Publication Date: 2005-07-06
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the lubrication of micromachines challenges the traditional lubrication theory and technology.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] ZrO on glass slides and single crystal wafers 2 / The preparation process of perfluoropolyether composite lubricating film is as follows:

[0025] (1) Under vigorous stirring, heat and dissolve 0.02mol crystalline zirconium oxychloride in 100ml of absolute ethanol, add citric acid to adjust the pH=2.5, add 0.6ml polyethylene glycol 2000, and prepare the solution in Aging in a water bath for 72 hours to obtain a clear and transparent zirconia precursor sol;

[0026] (2) Using monocrystalline silicon wafers and glass wafers as substrates;

[0027] (3) the prepared ZrO 2 The sol is prepared on the glass slide or single crystal silicon substrate by dipping-pulling method, the film-making temperature is 15-25°C, the relative humidity is 40-50%, and the pulling speed is controlled at 42.4cm / min to obtain the sol film ;

[0028] (4) Dry the sol film in the air at room temperature to 50°C for 15 minutes, then heat it to 550°C within 50 minutes and keep it warm for 30 minute...

Embodiment 2

[0035] ZrO on aluminum and stainless steel sheets 2 The preparation process of ceramic film and perfluoropolyether ultra-thin lubricating film is as follows:

[0036] (1) crystallized zirconium oxychloride is changed into crystallized zirconium chloride in embodiment 1, adjusts PH=2.5 to change PH=1.5 into:

[0037] (2) Based on aluminum and stainless steel sheets:

[0038] (3) Change the used perfluoropolyether Z-Dol2000 or Z-Dol4000 to AM2001 or AM3001, and change the solvent used to Vertrel XF:

[0039] (4) Other steps are the same as in Example 1.

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PUM

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Abstract

The invention discloses a process for preparing ZrO#-[2] / perfluoropolyether composite lubrication thin film on the surface of solid materials, wherein the Sol-Gel process is employed to prepare ZrO2 ceramic film on slide glasses, monocrystalline silicon sheet, aluminum sheet or stainless steel substrate, then a Dip-coating method is employed for preparing single-layer all-fluorine polyether ultra-thin lubricant film on the ZrO2 ceramic film. The prepared lubricant film has good tribology performance, thus can be used as antifriction and antiwear protective coatings.

Description

Technical field: [0001] The invention relates to a method for preparing ZrO on the surface of solid materials 2 / perfluoropolyether composite lubricating film, so as to provide effective means for solving the protection and lubrication problems of materials in micromachines and magnetic recording systems. Background technique: [0002] The micro-electro-mechanical system (MEMS for short) or micro-machine (Micro machine), which emerged in the mid-to-late 1980s, has a series of characteristics such as small size, light weight, low energy consumption, high degree of integration and intelligence. The field of bioengineering has great application potential. It is worth noting that with the miniaturization of the structure size of micromachines, the ratio of their surface area to volume increases significantly. Compared with internal force and gravity, electrostatic force and friction force become the objects that need to be given priority. In this system, "contact" and "separat...

Claims

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Application Information

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IPC IPC(8): C10M107/38
Inventor 杨生荣王金清刘晓红
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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